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公开(公告)号:US20220199526A1
公开(公告)日:2022-06-23
申请号:US17406887
申请日:2021-08-19
发明人: Won Kyu Han , Myeongsoo Lee , Rakhwan Kim , Woojin Jang
IPC分类号: H01L23/528 , H01L23/522
摘要: An integrated circuit device includes a substrate and a first electrically insulating layer on the substrate. An electrically conductive contact plug is provided, which extends at least partially through the first electrically insulating layer. The contact plug includes a protrusion having a top surface that is spaced farther from the substrate relative to a top surface of a portion of the first electrically insulating layer extending adjacent the contact plug. An electrically conductive line is provided with a terminal end, which extends on a first portion of the protrusion. A second electrically insulating layer is provided, which extends on a second portion of the protrusion and on the first electrically insulating layer. The second electrically insulating layer has a sidewall, which extends opposite a sidewall of the terminal end of the electrically conductive line.
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公开(公告)号:US11908798B2
公开(公告)日:2024-02-20
申请号:US17406887
申请日:2021-08-19
发明人: Won Kyu Han , Myeongsoo Lee , Rakhwan Kim , Woojin Jang
IPC分类号: H01L23/528 , H01L23/522 , H01L27/092
CPC分类号: H01L23/5283 , H01L23/5226 , H01L27/092
摘要: An integrated circuit device includes a substrate and a first electrically insulating layer on the substrate. An electrically conductive contact plug is provided, which extends at least partially through the first electrically insulating layer. The contact plug includes a protrusion having a top surface that is spaced farther from the substrate relative to a top surface of a portion of the first electrically insulating layer extending adjacent the contact plug. An electrically conductive line is provided with a terminal end, which extends on a first portion of the protrusion. A second electrically insulating layer is provided, which extends on a second portion of the protrusion and on the first electrically insulating layer. The second electrically insulating layer has a sidewall, which extends opposite a sidewall of the terminal end of the electrically conductive line.
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