公开(公告)号：US11029256B2

公开(公告)日：2021-06-08

申请号：US16846978

申请日：2020-04-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Heung Ahn ,  Racine Nassau ,  Su Hwan Park ,  Ki Wan Seo ,  Nam Il Koo ,  In Keun Baek ,  Jong Min Yoon ,  Ik Seon Jeon

IPC: G01N21/95

Abstract: Provided is an apparatus for measuring a wafer. The apparatus may include a chuck disposed on a stage and a plate connected with the stage, a horizontal frame configured to support a wafer, and a vertical frame connecting the plate and the horizontal frame. The apparatus may further include first to third adsorption portions connected with the horizontal frame and configured to adsorb the wafer, a support bar penetrating through the chuck and extending in a first direction and a beam irradiator connected to the support bar and disposed between the plate and the horizontal frame. The beam irradiator may be configured to irradiate a beam on the wafer. The apparatus may further include a detector on an opposite side of the horizontal frame from the beam irradiator and configured to receive the beam after it has penetrated through the wafer.

公开(公告)号：US10570264B2

公开(公告)日：2020-02-25

申请号：US15783315

申请日：2017-10-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyung Rim Kim ,  Nam Il Koo ,  Sun Kwon Kim ,  Jeong Ho Moon ,  Sun Woo Park ,  Jong Sung Lee ,  Ji Min Lee

IPC: C08J7/04 ,  C09D7/61 ,  C09D4/06 ,  C09D133/14 ,  G06F3/044

Abstract: A photocurable coating composition includes 50 to 150 parts by weight of a urethane acrylate oligomer having a number average molecular weight of 1300 to 1700 g/mol and 9 functional groups, 50 to 150 parts by weight of an acrylate monomer, 10 to 15 parts by weight of a photoinitiator, and 1 to 3 parts by weight of a surfactant.

公开(公告)号：US20180105662A1

公开(公告)日：2018-04-19

申请号：US15783315

申请日：2017-10-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyung Rim Kim ,  Nam Il Koo ,  Sun Kwon Kim ,  Jeong Ho Moon ,  Sun Woo Park ,  Jong Sung Lee ,  Ji Min Lee

IPC: C08J7/04 ,  C09D4/06 ,  C09D133/14 ,  C09D7/12 ,  G06F3/044

CPC classification number: C08J7/04 ,  C08F2222/1086 ,  C08J2333/14 ,  C08J2483/06 ,  C09D4/00 ,  C09D4/06 ,  C09D7/60 ,  C09D7/61 ,  C09D133/14 ,  G06F3/044 ,  G06F2203/04103 ,  C08F220/18 ,  C08L83/04

Abstract: A photocurable coating composition includes 50 to 150 parts by weight of a urethane acrylate oligomer having a number average molecular weight of 1300 to 1700 g/mol and 9 functional groups, 50 to 150 parts by weight of an acrylate monomer, 10 to 15 parts by weight of a photoinitiator, and 1 to 3 parts by weight of a surfactant.