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公开(公告)号:US20190122903A1
公开(公告)日:2019-04-25
申请号:US15972350
申请日:2018-05-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: SEUNG BO SHIM , HYUK KIM , SUN TAEK LIM , JAE MYUNG CHOE , JEON IL LEE , SUNG-IL CHO
IPC: H01L21/67 , H01L21/683 , H01J37/32 , H01L21/3065
Abstract: Provided are a plasma treatment apparatus and a method of fabricating semiconductor device using the same. The plasma treatment apparatus includes a chamber which provides a plasma treatment space, a bottom electrode disposed in the chamber and supports a wafer, a top electrode disposed in the chamber facing the bottom electrode, a source power source which supplies a source power output of a first frequency to the bottom electrode, a bias power source which supplies a bias power output of a second frequency different from the first frequency to the bottom electrode, and a pulse power source which applies a pulse voltage to the bottom electrode, wherein the bias power output is a bias voltage which is pulse-modulated to a first voltage level in a first time section and pulse-modulated to a second voltage level in a second time section and is applied to the bottom electrode.