公开(公告)号：US20220146571A1

公开(公告)日：2022-05-12

申请号：US17517057

申请日：2021-11-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyung Il KIM ,  Se-Hyun SEO ,  Byeong Min YU ,  Jae Hong KIM ,  Sang Jae RHEE ,  Young Chyel LEE

IPC: G01R31/28 ,  G01R1/04

Abstract: A test apparatus includes a first module configured to structurally support a target semiconductor device, and a second module reversibly attachable to the first module. The first module includes a first housing including one or more inner surfaces at least partially defining an inner space, a volume control unit configured to control a volume of the inner space, a mounting unit at least partially exposed to the inner space and configured to be exposed to the target semiconductor device, and a magnetic force control unit in the first housing. The second module includes a second housing, a test board in the second housing, and an attachable/detachable member in the second housing. The test board may be electrically connected to the target semiconductor device. The magnetic force control unit may control a magnetic property of the attachable/detachable member to cause the attachable/detachable member to attach/detach to/from the magnetic force control unit.