公开(公告)号：US20230333467A1

公开(公告)日：2023-10-19

申请号：US17964376

申请日：2022-10-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sunghwan KIM ,  Kyungwon KANG ,  Dongwook KIM ,  Seungjoon SONG ,  Seok HEO ,  Younseon WANG ,  Dasom LEE

IPC: G03F7/00 ,  G03F7/30

CPC classification number: G03F7/0025 ,  G03F7/3021

Abstract: A spin coater may include a spin chuck, a nozzle, a first temperature controller and a second temperature controller. The spin chuck may be configured make contact with a central portion of a lower surface of a substrate and may be configured to rotate the substrate when photoresist is on the substrate. The nozzle may be arranged over a central portion of the spin chuck and configured to provide a central portion of an upper surface of the substrate with photoresist. The first temperature controller may be configured to control a temperature in a first region of the spin chuck. The second temperature controller may be configured to control a temperature in a second region of the spin chuck.