SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

    公开(公告)号:US20240310739A1

    公开(公告)日:2024-09-19

    申请号:US18436127

    申请日:2024-02-08

    CPC classification number: G03F7/70725 G03F7/2043 G03F7/70808

    Abstract: A substrate processing apparatus includes a substrate stage configured to support a semiconductor substrate, the substrate stage being rotatable at a predetermined angular velocity, and a discharge device above the substrate stage, the discharge device being configured to discharge a chemical solution onto the semiconductor substrate, and the discharge device including a nozzle arm movable along a radial direction from a central region of the substrate stage to a peripheral region surrounding the central region, a nozzle on the nozzle arm, the nozzle facing the substrate stage, and the nozzle being configured to discharge the chemical solution onto the semiconductor substrate at a predetermined angle relative to a surface of the semiconductor substrate, and an angle changer configured to change the predetermined angle such that the predetermined angle gradually decreases as the nozzle arm moves from the central region to the peripheral region.

    METHOD AND APPARATUS FOR UPDATING PACKET PROCESSING RULE AT HIGH SPEED IN SDN NETWORK ENVIRONMENT

    公开(公告)号:US20240223507A1

    公开(公告)日:2024-07-04

    申请号:US18397337

    申请日:2023-12-27

    CPC classification number: H04L47/6205 H04L47/32

    Abstract: The disclosure relates to a 5G or 6G communication system for supporting a higher data transmission rate. A method performed by a first network entity in a wireless communication system is provided. The method includes receiving, from a second network entity, a first message including information on at least one of a type, a size, or an identifier of an action buffer, which is for creating of the action buffer, receiving, from the second network entity, a second message including the identifier for adding of at least one action to multiple memories assigned to the action buffer created based on the first message, and performing an arbitrary action for an input packet based on an address of memory in which the arbitrary action among the at least one action is stored.

    SPIN COATER
    4.
    发明公开
    SPIN COATER 审中-公开

    公开(公告)号:US20230333467A1

    公开(公告)日:2023-10-19

    申请号:US17964376

    申请日:2022-10-12

    CPC classification number: G03F7/0025 G03F7/3021

    Abstract: A spin coater may include a spin chuck, a nozzle, a first temperature controller and a second temperature controller. The spin chuck may be configured make contact with a central portion of a lower surface of a substrate and may be configured to rotate the substrate when photoresist is on the substrate. The nozzle may be arranged over a central portion of the spin chuck and configured to provide a central portion of an upper surface of the substrate with photoresist. The first temperature controller may be configured to control a temperature in a first region of the spin chuck. The second temperature controller may be configured to control a temperature in a second region of the spin chuck.

    ELECTRONIC DEVICE FOR CHANGING OPERATION OF WIRELESS COMMUNICATION BASED ON CHANGE OF ANGLE OF HOUSING AND METHOD THEREFOR

    公开(公告)号:US20230126559A1

    公开(公告)日:2023-04-27

    申请号:US18071927

    申请日:2022-11-30

    Abstract: An electronic device includes: a hinge structure; a foldable housing including a first housing structure and a second housing structure that are configured to be foldable relative to each other around the hinge structure; a first antenna provided in the first housing structure; a second antenna provided in the second housing structure; a communication circuit electrically connected to the first antenna and the second antenna, and configured to transmit and receive data through a first link and a second link established between an external electronic device and the electronic device; and a processor operatively connected to the communication circuit, wherein the processor is configured to: identify whether an angle between the first housing structure and the second housing structure satisfies a specified condition; and control the communication circuit to transmit, through at least one of the first link and the second link, a signal related to a change in an operation of short-range wireless communication, based on whether the angle satisfies the specified condition.

    SEMICONDUCTOR DEVICES
    6.
    发明公开

    公开(公告)号:US20240128335A1

    公开(公告)日:2024-04-18

    申请号:US18369236

    申请日:2023-09-18

    Abstract: A semiconductor device includes an active region on a substrate, a plurality of channel layers spaced apart from each other, a gate structure on the substrate, a source/drain region on at least one side of the gate structure, and a contact plug connected to the source/drain region. The contact plug includes a metal-semiconductor compound layer and a barrier layer on the metal-semiconductor compound layer. The contact plug includes a first inclined surface and a second inclined surface positioned where the metal-semiconductor compound layer and the barrier layer directly contact each other. The barrier layer includes first and second ends protruding towards the gate structure. The first and second ends are positioned at a level higher than an upper surface of an uppermost channel layer. An uppermost portion of the metal-semiconductor compound layer is positioned at a level higher than an upper surface of the source/drain region.

    METHOD AND APPARATUS FOR OFFLOADING TRAFFIC IN A WIRELESS COMMUNICATION

    公开(公告)号:US20240073733A1

    公开(公告)日:2024-02-29

    申请号:US18095622

    申请日:2023-01-11

    CPC classification number: H04W28/0236 H04W24/08

    Abstract: Disclosed is a 5G or 6G communication system to be provided for supporting higher data rates beyond a 4G communication system such as LTE. In particular, a method performed by a first device in a communication system is disclosed, and includes detecting a need to update a traffic processing rule in a second device processing traffic together with the first device; determining whether to update the traffic processing rule to be used in the second device based on performance information of the first device and performance profile information of the second device; and delivering information related to the update of the traffic processing rule to the second device based on the determination.

    METHOD AND APPARATUS FOR TRANSMITTING DATA IN MOBILE COMMUNICATION SYSTEM

    公开(公告)号:US20240073300A1

    公开(公告)日:2024-02-29

    申请号:US18365557

    申请日:2023-08-04

    CPC classification number: H04L69/22

    Abstract: A data transmission method and apparatuses in a wireless communication system are provided. More particularly, a method performed by a first node in a wireless communication system is provided. The method includes receiving header configuration information from a second node, if header configuration information indicates to contain first data including one or more of network management information and user service provision information into a header, transmitting a packet including the first data and additional information for parsing the first data to the second node, and receiving a response to the first data from the second node which receives the packet.

    INTEGRATED CIRCUIT DEVICE
    9.
    发明公开

    公开(公告)号:US20230178476A1

    公开(公告)日:2023-06-08

    申请号:US17864716

    申请日:2022-07-14

    Abstract: An integrated circuit device includes a conductive region disposed on a substrate, an insulating structure including a contact hole disposed in the conductive region and extending from the conductive region in a vertical direction, a local capping pattern having an outer sidewall in contact with an upper portion of an inner wall of the contact hole and an inner sidewall facing an inside of the contact hole and having a width gradually increasing in a horizontal direction away from the substrate, and a conductive plug passing through the insulating structure through the contact hole in the vertical direction, having a lower sidewall in contact with the insulating structure and an upper sidewall in contact with the local capping pattern, and including a first metal.

    ELECTRONIC DEVICE FOR PERFORMING SCANNING OF LINK AND OPERATION METHOD FOR SAME

    公开(公告)号:US20230156841A1

    公开(公告)日:2023-05-18

    申请号:US18081233

    申请日:2022-12-14

    CPC classification number: H04W76/15 H04W72/512 H04W28/0263

    Abstract: Methods and apparatuses for scanning a link are provided. An electronic device includes a communication circuit configured to perform data communications with an external electronic device through a plurality of links, and a processor configured to: determine whether to simultaneously perform or sequentially perform a first scan of the first link and a second scan of the second link, based on first characteristics of the first link and second characteristics of the second link; stop data communications through the first link and perform at least one data communication through the second link, before performing the first scan of the first link, in response to a determination to sequentially perform the first scan of the first link and the second scan of the second link; and control the communication circuit to perform data communications through the second link while performing the first scan of the first link.

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