公开(公告)号：US20150037951A1

公开(公告)日：2015-02-05

申请号：US14515997

申请日：2014-10-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-IL Il Chang ,  Changhyun Lee ,  Byoungkeun Son ,  Jin-Soo Lim

IPC: H01L27/115 ,  H01L21/311 ,  H01L21/02

CPC classification number: H01L27/11582 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/31111 ,  H01L21/8221 ,  H01L27/0688 ,  H01L27/11556 ,  H01L29/4232 ,  H01L29/42372

Abstract: Three-dimensional semiconductor devices are provided. The three-dimensional semiconductor device includes a substrate, a buffer layer on the substrate. The buffer layer includes a material having an etching selectivity relative to that of the substrate. A multi-layer stack including alternating insulation patterns and conductive patterns is provided on the buffer layer opposite the substrate. One or more active patterns respectively extend through the alternating insulation patterns and conductive patterns of the multi-layer stack and into the buffer layer. Related fabrication methods are also discussed.

Abstract translation: 提供三维半导体器件。 三维半导体器件包括衬底，衬底上的缓冲层。 缓冲层包括具有相对于衬底的蚀刻选择性的材料。 在与衬底相对的缓冲层上提供包括交替绝缘图案和导电图案的多层堆叠。 一个或多个有源图案分别延伸穿过多层堆叠的交替绝缘图案和导电图案并进入缓冲层。 还讨论了相关的制造方法。