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公开(公告)号:US10957647B2
公开(公告)日:2021-03-23
申请号:US16358212
申请日:2019-03-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dong-kak Lee , Yoon-ho Son , Mong-sup Lee , Wook-yeol Yi
IPC: H01L23/532 , H01L27/108 , H01L23/522 , H01L21/762 , H01L21/768
Abstract: Integrated circuit (IC) devices are provided. An IC device includes a substrate including an active region. The IC device includes a bit line on the substrate. The IC device includes a direct contact connected between the active region and the bit line. The IC device includes a contact plug on the substrate. Moreover, the IC device includes a boron-containing insulating pattern between the contact plug and the direct contact.
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公开(公告)号:US20200051921A1
公开(公告)日:2020-02-13
申请号:US16358212
申请日:2019-03-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dong-kak Lee , Yoon-ho Son , Mong-sup Lee , Wook-yeol Yi
IPC: H01L23/532 , H01L27/108 , H01L21/768 , H01L21/762 , H01L23/522
Abstract: Integrated circuit (IC) devices are provided. An IC device includes a substrate including an active region. The IC device includes a bit line on the substrate. The IC device includes a direct contact connected between the active region and the bit line. The IC device includes a contact plug on the substrate. Moreover, the IC device includes a boron-containing insulating pattern between the contact plug and the direct contact.
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