RESIN DISPENSER FOR NANO-IMPRINT
    1.
    发明申请
    RESIN DISPENSER FOR NANO-IMPRINT 审中-公开
    用于纳米印刷的树脂分配器

    公开(公告)号:US20150108688A1

    公开(公告)日:2015-04-23

    申请号:US14307753

    申请日:2014-06-18

    CPC classification number: B41F31/02 G03F7/0002

    Abstract: A resin dispenser for nano-imprinting includes a housing including a lower chamber in which a resin is filled, a slit defined in a lower part of the lower chamber and through which the resin is discharged, and an upper chamber in which a pressure-applying fluid is filled, and a membrane separating the lower and upper chambers from each other, and of which an edge is fixed on a middle part of the housing, where the fluid is configured to apply the pressure to the membrane and protrude the membrane toward the slit of the lower chamber.

    Abstract translation: 用于纳米压印的树脂分配器包括壳体,其包括下室,其中填充有树脂,限定在下室的下部并且树脂被排出的狭缝以及其中施加压力的上室 流体被填充,以及将下部和上部腔室彼此分开的膜,并且其中边缘固定在壳体的中间部分上,其中流体构造成将压力施加到膜并将膜突出到 下腔狭缝。

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