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公开(公告)号：US20150108688A1
公开(公告)日：2015-04-23
申请号：US14307753
申请日：2014-06-18
Applicant: Samsung Electronics Co., Ltd. , Samsung Display Co., Ltd.
Inventor： Bong-su SHIN , Dong-ouk KIM , Joon-young PARK , Sung-hoon LEE , Jae-seung CHUNG , Suk-gyu HAHM , Dae-young LEE , Gug-rae JO
CPC classification number: B41F31/02 , G03F7/0002
Abstract: A resin dispenser for nano-imprinting includes a housing including a lower chamber in which a resin is filled, a slit defined in a lower part of the lower chamber and through which the resin is discharged, and an upper chamber in which a pressure-applying fluid is filled, and a membrane separating the lower and upper chambers from each other, and of which an edge is fixed on a middle part of the housing, where the fluid is configured to apply the pressure to the membrane and protrude the membrane toward the slit of the lower chamber.
Abstract translation: 用于纳米压印的树脂分配器包括壳体，其包括下室，其中填充有树脂，限定在下室的下部并且树脂被排出的狭缝以及其中施加压力的上室 流体被填充，以及将下部和上部腔室彼此分开的膜，并且其中边缘固定在壳体的中间部分上，其中流体构造成将压力施加到膜并将膜突出到 下腔狭缝。
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公开(公告)号：US20160152022A1
公开(公告)日：2016-06-02
申请号：US15010474
申请日：2016-01-29
Applicant: Samsung Electronics Co., Ltd. , Samsung Display Co., LTD.
Inventor： Bong-su SHIN , Dong-ouk KIM , Joon-young PARK , Sung-hoon LEE , Jae-seung CHUNG , Suk-gyu HAHM , Dae-young LEE , Gug-rae JO
IPC: B41F31/02
CPC classification number: B41F31/02 , G03F7/0002
Abstract: A resin dispenser for nano-imprinting includes a housing including a lower chamber in which a resin is filled, a slit defined in a lower part of the lower chamber and through which the resin is discharged, and an upper chamber in which a pressure-applying fluid is filled, and a membrane separating the lower and upper chambers from each other, and of which an edge is fixed on a middle part of the housing, where the fluid is configured to apply the pressure to the membrane and protrude the membrane toward the slit of the lower chamber.
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