公开(公告)号：US5332443A

公开(公告)日：1994-07-26

申请号：US73958

申请日：1993-06-09

申请人： Sandy M.-S. Chew ,  Shane D. Clark ,  Ron L. Rose ,  Dale R. DuBois ,  Cissy Leung ,  Alan F. Morrison ,  Manus K. Wong

发明人： Sandy M.-S. Chew ,  Shane D. Clark ,  Ron L. Rose ,  Dale R. DuBois ,  Cissy Leung ,  Alan F. Morrison ,  Manus K. Wong

IPC分类号： C23C16/458 ,  H01L21/00 ,  H01L21/673 ,  H01L21/687 ,  C23C16/00

CPC分类号： H01L21/68742 ,  C23C16/4583 ,  H01L21/67103 ,  H01L21/68785

摘要： A substrate lifting apparatus for use in a substrate processing apparatus which includes a thermal reactor having a substrate processing chamber and a substrate support located in the chamber. The lifting apparatus consists of a generally circular shaped support with four seats formed therein; four substrate lifting elements, each having a substrate engaging end and a securing tab sized to be received in a seat; a fastener, associated with each lifting element, which secures the tab into the seat; and an adjuster, associated with each lifting element, located between the tab and the seat. When the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.

摘要翻译： 一种用于基板处理装置的基板提升装置，其包括具有基板处理室和位于所述室中的基板支撑件的热反应器。 提升装置由大致圆形的支撑件组成，其中形成有四个座; 四个基板提升元件，每个基板提升元件各自具有基板接合端和尺寸设置成容纳在座中的固定片; 与每个提升元件相关联的紧固件，其将突片固定到座中; 以及与每个提升元件相关联的调节器，位于突片和座之间。 当突片固定在座椅中并且调节器被操作时，提升元件在平行于通过紧固件和调节器的中心形成的平面的平面中移动。