公开(公告)号：US08165837B1

公开(公告)日：2012-04-24

申请号：US12478844

申请日：2009-06-05

申请人： Saravanan Paramasivam ,  Patrick Y. Huet ,  Martin Plihal ,  Luc Debarge

发明人： Saravanan Paramasivam ,  Patrick Y. Huet ,  Martin Plihal ,  Luc Debarge

IPC分类号： G01N37/00

CPC分类号： G01R31/2894

摘要： A computerized method for categorizing defects on a substrate. A list of defects on the substrate is received as input to a processor, where each defect is represented by a defect location and an associated micro-defect code. The input is analyzed with the processor to detect spatial clusters of defects on the substrate. The spatial clusters are analyzed with the processor to determine which of the spatial clusters represent known macro-defects and which of the spatial clusters represent unknown macro-defects. The micro-defect code associated with each defect that is included in one of the spatial clusters that is determined to be a known macro-defect is changed with the processor with a macro-defect code that is associated solely with the known macro-defect. The processor analyzes the defects that are included in one of the spatial clusters that is determined to be an unknown macro-defect to determine a predominantly occurring micro-defect code. The processor changes the micro-defect code associated with each defect that is included in the one spatial cluster that is determined to be an unknown macro-defect with the predominantly-occurring micro-defect code. The processor sends the changed list of defects on the substrate as output.

摘要翻译： 用于对基板上的缺陷进行分类的计算机化方法。 接收基板上的缺陷列表作为处理器的输入，其中每个缺陷由缺陷位置和相关联的微缺陷代码表示。 用处理器分析输入以检测衬底上的缺陷的空间簇。 用处理器分析空间聚类，以确定空间簇中的哪一个表示已知的宏缺陷，哪些空间簇表示未知的宏观缺陷。 与被确定为已知宏缺陷的空间集群之一中包括的每个缺陷相关联的微缺陷代码与具有仅与已知宏缺陷相关联的宏缺陷代码的处理器改变。 处理器分析被确定为未知宏缺陷的空间集群之一中包含的缺陷，以确定主要发生的微缺陷代码。 处理器改变与被确定为具有主要发生的微缺陷代码的未知宏缺陷的一个空间簇中包括的每个缺陷相关联的微缺陷代码。 处理器在衬底上发送更改的缺陷列表作为输出。