公开(公告)号：US20070158598A1

公开(公告)日：2007-07-12

申请号：US11682776

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G01J3/10

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH− ions, ozone, O2− ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区域产生负离子或自由基，例如含有氧原子的不稳定的化学种子，例如OH基，OH - ，O 2 - ， - O - 离子，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US07733563B2

公开(公告)日：2010-06-08

申请号：US11682794

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G02B5/20

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： An optical system has fluoride compounds provided in an environment exposed by vacuum ultraviolet light or plasma light, which has higher photon energy than an absorption wavelength of a base stock of the optical system. 1-layer of a protective film of SiO2 or metal oxides having a film thickness of 2-20 nm is formed at least on the light irradiation side (inner side) of the optical system to prevent the stripping of the fluorine atoms from the surface of the optical system. In addition, the protective film is a 1-layer film selected from one of SiO2, MgO, TiO2, or ZrO2.

摘要翻译： 光学系统具有在由真空紫外线或等离子体光暴露的环境中提供的氟化合物，其具有比光学系统的基础材料的吸收波长更高的光子能量。 至少在光学系统的光照射侧（内侧）形成有SiO 2的保护膜或膜厚度为2-20nm的金属氧化物的1层，以防止氟原子从表面剥离 光学系统。 此外，保护膜是选自SiO 2，MgO，TiO 2或ZrO 2中的一层膜。

公开(公告)号：US20050242379A1

公开(公告)日：2005-11-03

申请号：US10833998

申请日：2004-04-29

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： B08B7/00 ,  B08B17/00 ,  G02B27/00 ,  H01L29/76

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH− ions, ozone, O2− ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区域产生负离子或自由基，例如含有氧原子的不稳定的化学种子，例如OH基，OH - ，O 2 - ， - O - 离子，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US07440206B2

公开(公告)日：2008-10-21

申请号：US11682800

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G02B7/00

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： An optical properties restoration apparatus improves reliability and longevity of optical properties of an optical system, lying upon a vacuum boundary, by preventing, suppressing, or improving degradation of optical properties. The apparatus includes creating the near vacuum zone to excite an oxidation reaction of carbon, generating a flow of an oxygen atom-containing gas such as water gas or oxide gas in the near vacuum zone, and supplying active energy in the near vacuum zone to cause a carbon oxidation reaction between the oxygen atom-containing gas and the carbon. The near vacuum zone faces the lighting surfaces of the optical system and a lower limit value for a partial pressure of the gases containing oxygen atoms that is supplied to the near vacuum zone is set to a level over a speed of the carbon buildup that deposits on the lighting surfaces of the optical system.

摘要翻译： 光学性能恢复装置通过防止，抑制或改善光学性能的劣化来提高位于真空边界的光学系统的光学性质的可靠性和寿命。 该装置包括产生近真空区域以激发碳的氧化反应，在近真空区域中产生含氧原子的气体如水气或氧化物气体的流，并在近真空区域中提供活性能量以引起 含氧原子气体和碳之间的碳氧化反应。 近真空区域面向光学系统的照明表面，并且将供应到近真空区域的含有氧原子的气体的分压的下限值设定为高于沉积在碳沉积速度上的水平 光学系统的照明表面。

公开(公告)号：US20070158600A1

公开(公告)日：2007-07-12

申请号：US11682794

申请日：2007-03-06

申请人： Satoshi SAKAI ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi SAKAI ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G01J3/10

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH.ions, ozone, O2.ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区产生负离子或自由基，例如含有氧原子的不稳定的化学种子，例如OH自由基，OH，OH，OH，O，O， 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US07190512B2

公开(公告)日：2007-03-13

申请号：US10833998

申请日：2004-04-29

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G02B1/00 ,  G06K7/10

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH− ions, ozone, O2− ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区域产生负离子或自由基，例如含有氧原子的不稳定的化学种子，例如OH基，OH - ，O 2 - ， - O - 离子，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US07813036B2

公开(公告)日：2010-10-12

申请号：US11682776

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G06K7/10

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： An optical system includes a fluoride compound and has surfaces facing and exposed to plasma installed in an optical equipment which has an inner zone where the plasma exists. A 2 nm-20 nm protective film of a highly plasma-resistant material is formed on the surface of the fluoride compound that is exposed to the plasma.

摘要翻译： 光学系统包括氟化合物，并且具有面向和暴露于等离子体的表面，该表面安装在具有等离子体存在的内部区域的光学设备中。 在暴露于等离子体的氟化物的表面上形成高等离子体材料的2nm-20nm的保护膜。

公开(公告)号：US07453630B2

公开(公告)日：2008-11-18

申请号：US11682789

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： F21V9/06 ,  G02B5/20

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH ions, ozone, O2 ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制诸如光透射，衍射，反射，光谱产生和干扰的劣化效果，以及这些组合，并且通过这样做，降低诸如窗口更换的维护操作的频率，并且 降低此类操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区产生负离子或自由基，例如包含氧原子的不稳定的化学种子，例如OH自由基，OH离子，臭氧，O 2离子，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US20070158599A1

公开(公告)日：2007-07-12

申请号：US11682789

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G01J3/10

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH ions, ozone, O2-ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区产生负离子或自由基，例如包含氧原子的不稳定的化学种子，例如OH自由基，OH离子，臭氧，O 2，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US20070152172A1

公开(公告)日：2007-07-05

申请号：US11682800

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayshi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayshi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： A61N5/00

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH— ions, ozone, O2— ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区产生负离子或自由基，例如包含氧原子的不稳定的化学种子，例如OH自由基，OH-离子，臭氧，O 2 - 离子，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。