公开(公告)号：US5529831A

公开(公告)日：1996-06-25

申请号：US349155

申请日：1994-12-02

申请人： Satoshi Waga ,  Mitsuo Bitoh ,  Kazunari Takida ,  Kenji Shimizu ,  Kiyoshi Sasai ,  Yoshihiro Sudoh ,  Yoshinobu Kakihara

发明人： Satoshi Waga ,  Mitsuo Bitoh ,  Kazunari Takida ,  Kenji Shimizu ,  Kiyoshi Sasai ,  Yoshihiro Sudoh ,  Yoshinobu Kakihara

IPC分类号： H01F17/00 ,  H01F27/00 ,  H01F27/29 ,  H01F41/04 ,  H01L23/522 ,  H03H7/01 ,  H03H7/075 ,  B32B9/00

CPC分类号： H03H7/0115 ,  H01F17/0006 ,  H01F41/046 ,  H01L23/5227 ,  H01F2017/0066 ,  H01L2924/0002 ,  H03H2001/0078 ,  H03H2001/0085 ,  Y10S428/901 ,  Y10T428/12493 ,  Y10T428/12528 ,  Y10T428/24917

摘要： A thin film device comprising a substrate which is magnetic and has insulation property at least on the surface, coils formed spirally in a planar configuration on the substrate, a first interlayer insulation film formed to a portion excepting for the terminal portion of the coils and a magnetic material connection portion of the substrate, a magnetic film and a second interlayer insulation film formed successively on the first interlayer insulation film excepting for the terminal portions, and bump electrodes formed in connection with the terminal portions in which a crystallite material having a composition: Fe.sub.78 Ta.sub.10 C.sub.12 is used as the magnetic film. The thin film device can be formed an a reduced size and having a large inductance value. When the device is used as a noise filter, a cut-off frequency range can be lowered.

摘要翻译： 一种薄膜器件，包括磁性并且至少具有表面绝缘性能的衬底，在衬底上以平面形式螺旋形成的线圈，形成于除了线圈的端子部分之外的部分的第一层间绝缘膜和 所述基板的磁性材料连接部分，磁性膜和除了所述端子部分之外的所述第一层间绝缘膜上连续形成的第二层间绝缘膜以及与其中具有组成： Fe78Ta10C12用作磁性膜。 薄膜器件可以形成为减小的尺寸并且具有大的电感值。 当该装置用作噪声滤波器时，可以降低截止频率范围。