公开(公告)号：US09972345B1

公开(公告)日：2018-05-15

申请号：US14974743

申请日：2015-12-18

Applicant: Seagate Technology LLC

Inventor： Wei Tian ,  Hauqing Yin ,  Lei Lu ,  Yong Luo ,  Joseph Mundenar

IPC: G11B5/127 ,  G11B5/11

CPC classification number: G11B5/1272 ,  G11B5/112 ,  G11B5/1278

Abstract: A method includes depositing a layer of pole material on a substrate. The layer of pole material has a bottom surface that is adjacent to the substrate and a top surface that is opposite the bottom surface. A masking material is deposited over a portion of the top surface. Material from the pole material unprotected by the masking material is removed to form a write pole having first and second side walls. At least a portion of a trench formed by removal of the material from the layer of pole material is filled with a sacrificial material. The mask and a portion of the write pole at the top surface are removed to form a beveled trailing edge surface. The sacrificial material is then removed. Front shield gap material is deposited over the beveled trailing edge surface and over portions of the side walls.