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公开(公告)号:US09972345B1
公开(公告)日:2018-05-15
申请号:US14974743
申请日:2015-12-18
Applicant: Seagate Technology LLC
Inventor: Wei Tian , Hauqing Yin , Lei Lu , Yong Luo , Joseph Mundenar
CPC classification number: G11B5/1272 , G11B5/112 , G11B5/1278
Abstract: A method includes depositing a layer of pole material on a substrate. The layer of pole material has a bottom surface that is adjacent to the substrate and a top surface that is opposite the bottom surface. A masking material is deposited over a portion of the top surface. Material from the pole material unprotected by the masking material is removed to form a write pole having first and second side walls. At least a portion of a trench formed by removal of the material from the layer of pole material is filled with a sacrificial material. The mask and a portion of the write pole at the top surface are removed to form a beveled trailing edge surface. The sacrificial material is then removed. Front shield gap material is deposited over the beveled trailing edge surface and over portions of the side walls.
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公开(公告)号:US09286917B1
公开(公告)日:2016-03-15
申请号:US14701187
申请日:2015-04-30
Applicant: Seagate Technology LLC
Inventor: Venkateswara R. Inturi , Aly A. Bazama , Yong Luo , Joseph M. Mundenar
IPC: G11B5/147
CPC classification number: G11B5/147 , G11B5/1278 , G11B5/187 , G11B5/232 , G11B5/3116 , G11B5/315 , G11B5/3163
Abstract: A write pole may be formed by first depositing a dielectric layer onto a substrate and then patterning the dielectric layer to form a trench with a write pole shape. The trench is subsequently filled with the evaporation deposition of a magnetic material to form a write pole. The trench may have a greater depth dimension than width dimension.
Abstract translation: 可以通过首先将介电层沉积到衬底上,然后对介电层进行构图以形成具有写极形状的沟槽来形成写入极。 随后填充有磁性材料的蒸发沉积以形成写入极。 沟槽可以具有比宽度尺寸更大的深度尺寸。
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