公开(公告)号：US07682481B2

公开(公告)日：2010-03-23

申请号：US11646593

申请日：2006-12-28

申请人： Seiichi Takahashi ,  Takehisa Miyaya ,  Soo Boo Lim ,  Masayuki Satou ,  Kengo Tsutsumi ,  Yohei Ono

发明人： Seiichi Takahashi ,  Takehisa Miyaya ,  Soo Boo Lim ,  Masayuki Satou ,  Kengo Tsutsumi ,  Yohei Ono

IPC分类号： C23F1/00 ,  C23C16/00

CPC分类号： H01L21/67748 ,  C23C14/566 ,  H01L21/3065 ,  H01L21/6719 ,  H01L21/67751

摘要： The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.

摘要翻译： 本发明提供一种允许容易地更换处理室的真空处理装置。 本发明的真空处理装置具有处理室和搬入室。 进出室被固定并位于处理室上方的位置。 处理室可以通过垂直移动的机构降低。 因此，通过降低处理室，处理室与进出室分离。 传送装置连接到处理室，使得可以在从搬入室移出之后容易地输送处理室。 用于更换处理室的操作可以比常规系统更简单。