BUBBLE REMOVING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
    1.
    发明申请
    BUBBLE REMOVING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME 审中-公开
    泡沫拆卸单元和底板处理装置,包括它们

    公开(公告)号:US20170001127A1

    公开(公告)日:2017-01-05

    申请号:US15195225

    申请日:2016-06-28

    CPC classification number: B01D19/0057 B01D19/0052

    Abstract: A bubble removing unit is disclosed including a body having an inner space, through which a liquid flows, in an interior thereof, a liquid introducing pipe through which the liquid is supplied to the body, a liquid discharging pipe through which the liquid, from which bubbles are removed, is discharged from the body, a bubble discharging pipe through which the bubbles are discharged from the inner space, and a rod-shaped bar situated in the inner space and a length of which extends in a lengthwise direction of the body, wherein a variable cross-section part situated between the liquid introducing pipe and the liquid discharging pipe and a cross-section of which varies along the lengthwise direction of the body is provided in the inner space of the body.

    Abstract translation: 一种气泡去除单元,其包括一个主体,该主体具有内部空间,液体在其内部流动,液体引入管通过该液体引入管,液体通过该导入管供应到主体;液体排出管, 从体内排出气泡,从内部空间排出气泡的气泡排出管,位于内部空间中的长度方向延伸的杆状杆, 其特征在于,在所述主体的内部空间中设置有位于所述液体导入管和所述排液管之间的横截面变化的横截面,沿着所述主体的长度方向变化的横截面。

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