公开(公告)号：US20180122660A1

公开(公告)日：2018-05-03

申请号：US15796318

申请日：2017-10-27

Applicant: SEMES CO., LTD.

Inventor： Jae-Youl KIM ,  Jong Seok SEO ,  Seongsu KIM

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/027 ,  H01L21/02 ,  G03F1/68

Abstract: Embodiments of the inventive concept relate to an apparatus for supporting a substrate and a method for treating a substrate. The substrate support apparatus includes a substrate support member including a support plate having an upper surface that supports a substrate, and a heating member provided in the support plate to heat the substrate, wherein an area of the support plate has a buffer area, in which a buffer space for restricting a heat transfer rate of heat provided from the heating member to the upper surface is formed. The buffer space insulates a central area and a peripheral area, thereby maximizing a temperature difference between the central area and the peripheral area.

公开(公告)号：US20170001127A1

公开(公告)日：2017-01-05

申请号：US15195225

申请日：2016-06-28

Applicant: Semes Co., Ltd.

Inventor： Jaehyeok YU ,  Jae-Youl KIM ,  Oh Jin KWON

IPC: B01D19/00

CPC classification number: B01D19/0057 ,  B01D19/0052

Abstract: A bubble removing unit is disclosed including a body having an inner space, through which a liquid flows, in an interior thereof, a liquid introducing pipe through which the liquid is supplied to the body, a liquid discharging pipe through which the liquid, from which bubbles are removed, is discharged from the body, a bubble discharging pipe through which the bubbles are discharged from the inner space, and a rod-shaped bar situated in the inner space and a length of which extends in a lengthwise direction of the body, wherein a variable cross-section part situated between the liquid introducing pipe and the liquid discharging pipe and a cross-section of which varies along the lengthwise direction of the body is provided in the inner space of the body.

Abstract translation: 一种气泡去除单元，其包括一个主体，该主体具有内部空间，液体在其内部流动，液体引入管通过该液体引入管，液体通过该导入管供应到主体;液体排出管， 从体内排出气泡，从内部空间排出气泡的气泡排出管，位于内部空间中的长度方向延伸的杆状杆， 其特征在于，在所述主体的内部空间中设置有位于所述液体导入管和所述排液管之间的横截面变化的横截面，沿着所述主体的长度方向变化的横截面。