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公开(公告)号:US20220238719A1
公开(公告)日:2022-07-28
申请号:US17617015
申请日:2020-06-02
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Shunpei YAMAZAKI , Hiromi SAWAI , Hiroki KOMAGATA , Yasuhiro JINBO , Naoki OKUNO , Yoshihiro KOMATSU , Motoharu ANDO , Tomoaki MORIWAKA , Koji MORIYA , Jun ISHIKAWA
IPC: H01L29/786
Abstract: A semiconductor device with less variation in transistor characteristics is provided. The semiconductor device includes a semiconductor film, a pair of blocking films over the semiconductor film, and an insulating film provided over the semiconductor film and between the pair of blocking films. The semiconductor film includes a pair of n-type regions and an i-type region provided between the pair of n-type regions. The n-type regions overlap with the blocking films. The i-type region overlaps with the insulating film.