公开(公告)号：US20210216008A1

公开(公告)日：2021-07-15

申请号：US17037613

申请日：2020-09-29

申请人： Semiconductor Manufacturing International (Beijing) Corporation ,  Semiconductor Manufacturing International (Shanghai) Corporation

发明人： Yaojun DU

IPC分类号： G03F1/70 ,  G06F30/392 ,  G03F1/44

摘要： Correction method of mask layout and mask containing corrected layout are provided. The method includes providing a target layout including a plurality of main patterns. Each main pattern includes a first side and an opposite second side. Extending directions of the first side and the second side are perpendicular to a first direction. Each main pattern also includes a third side and an opposite fourth side. Extension directions of the third side and the fourth side are perpendicular to a second direction. The second direction and the first direction are perpendicular to each other. The method also includes acquiring position information of each main pattern, and obtaining position information of auxiliary patterns adjacent to each main pattern. The method also includes, according to the position information of the auxiliary patterns adjacent to each main pattern, arranging the auxiliary patterns adjacent to each main pattern around each main pattern.