公开(公告)号：US09678020B2

公开(公告)日：2017-06-13

申请号：US14795396

申请日：2015-07-09

申请人： Joon-Seo Song ,  Woo-seok Ko ,  Ji-Young Shin ,  Seong-Jin Yun ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

发明人： Joon-Seo Song ,  Woo-seok Ko ,  Ji-Young Shin ,  Seong-Jin Yun ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

IPC分类号： G01N21/95 ,  G01N21/88 ,  G01N21/956

CPC分类号： G01N21/9505 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/95692 ,  G01N2201/061

摘要： Example embodiments relate to an apparatus and method for inspecting a substrate defect. The substrate defect inspecting apparatus includes a substrate, a light source emitting an infrared beam to the substrate, a detector detecting the infrared beam reflected from the substrate, and a defect analyzer receiving first information and second information from the detector and analyzing defects existing in the substrate. According to at least one example embodiment, the second information is acquired during a later process than the first information.

公开(公告)号：US09455206B2

公开(公告)日：2016-09-27

申请号：US14796478

申请日：2015-07-10

申请人： Seong-Jin Yun ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

发明人： Seong-Jin Yun ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

IPC分类号： H01L21/66 ,  H01J37/22

CPC分类号： H01L22/20 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/2617 ,  H01J2237/2817

摘要： An overlay measuring method includes irradiating an electron beam onto a sample, including a multi-layered structure of overlapped upper and lower patterns formed thereon, to obtain an actual image of the upper and lower patterns. A first image representing the upper pattern and a second image representing the lower pattern are obtained from the actual image. A reference position for the upper and lower patterns is determined from a design image of the upper and lower patterns. A position deviation of the upper pattern with respect to the reference position in the first image and a position deviation of the lower pattern with respect to the reference position in the second image are calculated to determine an overlay between the upper pattern and the lower pattern.

摘要翻译： 覆盖测量方法包括将电子束照射到样品上，包括形成在其上的重叠的上下图案的多层结构，以获得上下图案的实际图像。 从实际图像中获得代表上部图案的第一图像和表示较低图案的第二图像。 根据上下图案的设计图像确定上下图案的参考位置。 计算上部图形相对于第一图像中的基准位置的位置偏差和下部图形相对于第二图像中的基准位置的位置偏差，以确定上部图案和下部图案之间的叠加。

公开(公告)号：US08500882B2

公开(公告)日：2013-08-06

申请号：US13125513

申请日：2009-10-22

申请人： Seong-Jin Yun ,  Byung-Kil Park

发明人： Seong-Jin Yun ,  Byung-Kil Park

IPC分类号： B01D53/02

CPC分类号： F24F3/1423 ,  B01D2257/80 ,  B01D2259/4508 ,  F24F3/1603 ,  F24F2001/0096

摘要： There is provided an air purifier having a dehumidification function, including: a body case having an inner space; a blower part installed in the inner space of the body case and drawing outside air from both sides of the body case through a single blower fan; an air purifying part purifying air drawn from one side of the body case; and a dehumidifying part removing moisture from air drawn from the other side of the body case by a dehumidifying rotor. Through the blower part drawing the air from both sides of the body case, the air purifier purifies the air drawn from one side of the body case and dehumidifies the air drawn from the other side of the body case. Accordingly, a drop in an airflow amount caused by concurrently performing the dehumidification and the purification may be alleviated, so improved dehumidification and purification effects are achieved.

摘要翻译： 提供一种具有除湿功能的空气净化器，包括：具有内部空间的主体壳体; 鼓风机部分安装在主体壳体的内部空间中并通过单个鼓风机从主体壳体的两侧抽出外部空气; 空气净化部净化从主体壳体的一侧抽取的空气; 以及除湿部，其通过除湿转子从主体壳体的另一侧抽出的空气除去水分。 通过从主体两侧抽出空气的鼓风机部分，空气净化器净化从主体壳体的一侧抽出的空气，并且从主体壳体的另一侧抽吸的空气进行除湿。 因此，可以减轻由同时进行除湿和净化而引起的气流量的下降，从而可以实现改善的除湿和净化效果。

公开(公告)号：US20110197770A1

公开(公告)日：2011-08-18

申请号：US13125513

申请日：2009-10-22

申请人： Seong-Jin Yun ,  Byung-Kil Park

发明人： Seong-Jin Yun ,  Byung-Kil Park

IPC分类号： B01D45/14

CPC分类号： F24F3/1423 ,  B01D2257/80 ,  B01D2259/4508 ,  F24F3/1603 ,  F24F2001/0096

摘要： There is provided an air purifier having a dehumidification function, including: a body case having an inner space; a blower part installed in the inner space of the body case and drawing outside air from both sides of the body case through a single blower fan; an air purifying part purifying air drawn from one side of the body case; and a dehumidifying part removing moisture from air drawn from the other side of the body case by a dehumidifying rotor. Through the blower part drawing the air from both sides of the body case, the air purifier purifies the air drawn from one side of the body case and dehumidifies the air drawn from the other side of the body case. Accordingly, a drop in an airflow amount caused by concurrently performing the dehumidification and the purification may be alleviated, so improved dehumidification and purification effects are achieved.

摘要翻译： 提供一种具有除湿功能的空气净化器，包括：具有内部空间的主体壳体; 鼓风机部分安装在主体壳体的内部空间中并通过单个鼓风机从主体壳体的两侧抽出外部空气; 空气净化部净化从主体壳体的一侧抽取的空气; 以及除湿部，其通过除湿转子从主体壳体的另一侧抽出的空气除去水分。 通过从主体两侧抽出空气的鼓风机部分，空气净化器净化从主体壳体的一侧抽出的空气，并且从主体壳体的另一侧抽吸的空气进行除湿。 因此，可以减轻由同时进行除湿和净化而引起的气流量的下降，从而可以实现改善的除湿和净化效果。