公开(公告)号：US20140375299A1

公开(公告)日：2014-12-25

申请号：US14283159

申请日：2014-05-20

申请人： Sergey G. Belostotskiy ,  Chinh Dinh ,  Andrew Nguyen ,  Michael G. Chafin

发明人： Sergey G. Belostotskiy ,  Chinh Dinh ,  Andrew Nguyen ,  Michael G. Chafin

IPC分类号： G01R19/00 ,  H01L21/683

CPC分类号： H01J37/00 ,  H01J37/32715 ,  H01J37/32935 ,  H01L21/6833

摘要： A direct (DC) voltage is applied to an electrode at a voltage value to clamp a workpiece to an electrostatic chuck in a processing chamber. The electrode is embedded into the electrostatic chuck. An electrostatic chuck current through the electrode at the DC voltage is measured. A DC self bias induced on the workpiece by a plasma is determined based on the electrostatic chuck current and the applied voltage.

摘要翻译： 将直流（DC）电压以电压值施加到电极，以将工件夹紧到处理室中的静电卡盘。 电极嵌入静电卡盘。 测量在直流电压下通过电极的静电卡盘电流。 基于静电卡盘电流和施加的电压来确定通过等离子体在工件上感应的DC自偏压。

公开(公告)号：US08148977B2

公开(公告)日：2012-04-03

申请号：US12360664

申请日：2009-01-27

申请人： Kartik Ramaswamy ,  Hiroji Hanawa ,  Lawrence Wong ,  Chinh Dinh

发明人： Kartik Ramaswamy ,  Hiroji Hanawa ,  Lawrence Wong ,  Chinh Dinh

IPC分类号： G01R33/02

CPC分类号： G01R33/0206 ,  G01R33/0023

摘要： Embodiments of sensor devices for characterizing magnetic fields formed in substrate processing systems and methods of use thereof are provided herein. In some embodiments, an apparatus for characterizing a magnetic field in a substrate processing system may include a carrier having a form substantially similar to a substrate to be processed in the substrate processing system. One or more magnetic sensors are disposed on the carrier for measuring a magnitude of a magnetic field formed in the processing system in an x-, y-, and z-direction. A microprocessor is coupled to the one or more magnetic sensors to sample data representative of the magnitude of the magnetic field in the x-, y-, and z-directions proximate a position of each sensor. A memory device is coupled to the microprocessor for storing the sampled data. A power source is provided to supply power to each magnetic sensor and the microprocessor.

摘要翻译： 本文提供了用于表征在基板处理系统中形成的磁场的传感器装置的实施例及其使用方法。 在一些实施例中，用于表征衬底处理系统中的磁场的装置可以包括具有基本上类似于在衬底处理系统中要处理的衬底的形式的载体。 一个或多个磁传感器设置在载体上，用于测量在x，y和z方向上在处理系统中形成的磁场的大小。 微处理器耦合到一个或多个磁性传感器以对表示在每个传感器的位置附近的x，y和z方向上的磁场的大小的数据进行采样。 存储器件耦合到微处理器以存储采样数据。 提供电源以向每个磁传感器和微处理器供电。