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    System and method for vacuum chamber leak detection
    1.
    发明授权
    System and method for vacuum chamber leak detection 有权
    真空室泄漏检测系统及方法

    公开(公告)号：US07590498B1

    公开(公告)日：2009-09-15

    申请号：US11948907

    申请日：2007-11-30

    申请人： Sherk Chung ,  Mukund Chakravarthy Venkatesh ,  Paxton Ming Kai Chow ,  Jiuyi Cheng ,  Paul Tran ,  Joseph Raymond Monkowski

    发明人： Sherk Chung ,  Mukund Chakravarthy Venkatesh ,  Paxton Ming Kai Chow ,  Jiuyi Cheng ,  Paul Tran ,  Joseph Raymond Monkowski

    IPC分类号： G01F17/00

    CPC分类号： G01M3/38

    摘要： Leaks in a processing chamber, including “virtual leaks” resulting from outgassing of material present within the chamber, may be detected utilizing an optical emission spectroscopy (OES) sensor configured to monitor light emitted from plasma of a sample from the chamber. According to certain embodiments, gas introduced into the chamber by the leak may be detected directly on the basis of its optical spectrum. Alternatively, gas introduced by the leak may be detected indirectly, based upon an optical spectrum of a material resulting from reaction of the gas attributable to the leak. According to one embodiment, data from the OES sensor is received by a processor that is configured to compute a leak detection index. The value of the leak detection index is compared against a threshold to determine if a leak is detected. If the value of the index crosses the threshold, a notification of the existence of a leak is sent.

    摘要翻译： 可以利用配置成监测来自腔室的样品的等离子体发射的光的光发射光谱（OES）传感器来检测在处理室中的泄漏，包括由室内存在的物质的放气引起的“虚泄”。 根据某些实施例，可以基于其光谱直接检测通过泄漏引入到腔室中的气体。 或者，可以基于由归因于泄漏的气体的反应产生的材料的光谱，间接地检测由泄漏引入的气体。 根据一个实施例，来自OES传感器的数据被配置为计算泄漏检测指数的处理器接收。 将泄漏检测索引的值与阈值进行比较，以确定是否检测到泄漏。 如果索引的值超过阈值，则发送泄漏存在的通知。

    High-speed SECS message services (HSMS) pass-through including bypass
    3.
    发明授权
    High-speed SECS message services (HSMS) pass-through including bypass 有权
    高速SECS消息服务（HSMS）传递包括旁路

    公开(公告)号：US08102844B1

    公开(公告)日：2012-01-24

    申请号：US11525539

    申请日：2006-09-21

    申请人： Andrew Bryan Nelson ,  Paxton Ming Kai Chow ,  Vera Alexandrova Snowball ,  Sherk Chung ,  Abhijit Majumdar

    发明人： Andrew Bryan Nelson ,  Paxton Ming Kai Chow ,  Vera Alexandrova Snowball ,  Sherk Chung ,  Abhijit Majumdar

    IPC分类号： H04L12/56

    CPC分类号： H04L67/2814 ,  H04L67/125 ,  H04L67/2823

    摘要： A method and system for intercepting and forwarding High-Speed SECS Message Services (HSMS) communication between at least two entities, includes a fail-safe bypass to ensure the communications link between the entities is not severed upon failure of the intercepting/forwarding agent. A “pass-through” agent is placed in between two entities communicating via an HSMS link, such that the pass-through agent is able to intercept messages from one entity and forward it to the other entity, and vice versa. The pass-through agent is able to see all messages between the two entities, and is also able to create HSMS messages and send them to one of the entities as if the message had come from the other entity, thereby conferring the ability to inject additional HSMS messages. Should the pass-through agent fail, a bypass mechanism ensures that the two entities can automatically resume HSMS communication without the pass-through agent.

    摘要翻译： 一种用于截取和转发至少两个实体之间的高速SECS消息服务（HSMS）通信的方法和系统，包括故障安全旁路，以确保在拦截/转发代理失败之后，实体之间的通信链路不会被切断。 “通过”代理被放置在通过HSMS链路通信的两个实体之间，使得传递代理能够拦截来自一个实体的消息并将其转发给另一个实体，反之亦然。 传递代理能够看到两个实体之间的所有消息，并且还能够创建HSMS消息并将它们发送到其中一个实体，就像消息来自另一个实体一样，从而赋予另外一个实体的能力 HSMS消息。 如果传递代理失败，旁路机制确保两个实体可以自动恢复HSMS通信而不使用直通代理。