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公开(公告)号:US06566728B1
公开(公告)日:2003-05-20
申请号:US09678555
申请日:2000-10-04
申请人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
发明人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
IPC分类号: H01L2900
CPC分类号: H04R19/005 , H04R19/04
摘要: First, a stationary electrode layer is formed over a semiconductor substrate and an integrated network is composed in a circuit element area around the stationary electrode layer by electrode wiring forming each circuit element. A spacer is arranged on a passivation film in plural places. A dummy island is formed in an area between the circuit element area and the stationary electrode layer area. Supply potential Vcc is applied to the dummy island and ground potential GND is applied to a P+-type separated area.
摘要翻译: 首先,在半导体衬底上形成固定电极层,并且通过形成每个电路元件的电极布线,在固定电极层周围的电路元件区域中形成集成网络。 在多个位置上在隔离膜上设置间隔物。 在电路元件区域和固定电极层区域之间的区域中形成虚设的岛。 将供电电位Vcc施加到虚拟岛,将接地电位GND施加到P +型分离区域。
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公开(公告)号:US06417560B1
公开(公告)日:2002-07-09
申请号:US09679117
申请日:2000-10-04
申请人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
发明人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
IPC分类号: H01L23552
CPC分类号: H04R19/005 , H04R19/04
摘要: A fixed electrode layer 12 is formed on a semiconductor substrate 11. A vibrating film is formed on the fixed electrode layer through a spacer 14. Since the vibrating film is a light-permeable film, in order to prevent the malfunction of an electronic circuit formed in the semiconductor substrate by incident light, the region where the electronic circuit is to be formed is covered with a shield metal 33.
摘要翻译: 固定电极层12形成在半导体基板11上。通过间隔件14在固定电极层上形成振动膜。由于振动膜是透光膜,为了防止形成电子电路的故障 在通过入射光在半导体衬底中,要形成电子电路的区域被屏蔽金属33覆盖。
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公开(公告)号:US06479878B1
公开(公告)日:2002-11-12
申请号:US09660061
申请日:2000-09-12
申请人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
发明人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
IPC分类号: H01L2982
CPC分类号: H04R7/16 , H04R19/005 , H04R19/04
摘要: A stationary electrode layer 12 is formed on a semiconductor substrate 11, and a vibrating diaphragm 16 is disposed on spacers 14. The vibrating diaphragm 16 is placed so as to protrude from an end of the semiconductor substrate 11, and terminal pads 20 to 23 are placed with being exposed from the vibrating diaphragm 16.
摘要翻译: 固定电极层12形成在半导体衬底11上,振动膜16设置在间隔件14上。振动膜16被放置成从半导体衬底11的一端突出,端子衬垫20至23为 放置在从振动膜16暴露的位置。
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公开(公告)号:US06420203B1
公开(公告)日:2002-07-16
申请号:US10032632
申请日:2001-12-28
申请人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
发明人: Shigeaki Okawa , Toshiyuki Ohkoda , Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Shuji Osawa
IPC分类号: H01L2100
CPC分类号: H04R7/16 , H04R19/005 , H04R19/04
摘要: A stationary electrode layer 12 is formed on a semiconductor substrate 11, and a vibrating diaphragm 16 is disposed on spacers 14. The vibrating diaphragm 16 is placed so as to protrude from an end of the semiconductor substrate 11, and terminal pads 20 to 23 are placed with being exposed from the vibrating diaphragm 16.
摘要翻译: 固定电极层12形成在半导体衬底11上,振动膜16设置在间隔件14上。振动膜16被放置成从半导体衬底11的一端突出,端子衬垫20至23为 放置在从振动膜16暴露的位置。
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公开(公告)号:US06326564B1
公开(公告)日:2001-12-04
申请号:US08495390
申请日:1995-06-28
IPC分类号: G06K1106
CPC分类号: G06F3/044
摘要: The sensitive coordinate input device of the present invention adopts a system in which the finger F of the operator is regarded as one electrode, and the electrostatic capacitance is varied depending on the changes in the distances between the finger and another electrode which is separated therefrom via a dielectric. Four electrodes are preferably disposed at regular angular positions. Among the four electrodes, two electrodes, and two electrodes which are located at opposite positions are spaced at intervals, respectively. Across the four electrodes, a sensitive member 15 is laid. The surface of the sensitive member is to be touched with the operator's finger F. The sensitive member is preferably formed by a dielectric having a high dielectric constant, such as a ceramic plate. According to the present invention, the area of sensitive area can easily be increased, and the determination of the cursor position on the screen of the CRT display apparatus can readily be performed.
摘要翻译: 本发明的灵敏坐标输入装置采用将操作者的手指F视为一个电极的系统,并且静电电容根据手指与另一电极之间的距离的变化而变化 电介质。 四个电极优选地设置在规则的角位置。 在四个电极中,位于相对位置的两个电极和两个电极分别间隔开。 在四个电极中,放置敏感元件15。 敏感部件的表面应与操作者的手指F相接触。敏感部件优选由具有高介电常数的电介质形成,例如陶瓷板。 根据本发明,可以容易地增加敏感区域的面积,并且可以容易地执行CRT显示装置的屏幕上的光标位置的确定。
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