公开(公告)号：US06565254B2

公开(公告)日：2003-05-20

申请号：US09875343

申请日：2001-06-06

申请人： Shigemi Sato ,  Osamu Iwamoto ,  Yasuhiro Shiohara ,  Yuji Oda

发明人： Shigemi Sato ,  Osamu Iwamoto ,  Yasuhiro Shiohara ,  Yuji Oda

IPC分类号： G01J512

CPC分类号： G01J5/04 ,  G01J5/02 ,  G01J5/021 ,  G01J5/0225 ,  G01J5/045 ,  G01J5/048 ,  G01J5/049 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0818 ,  G01J5/12 ,  G01J5/16 ,  G01J2005/068

摘要： An infrared sensing element of the present invention includes a base including a thin film portion and a thick wall portion arranged around the thin film portion, and a thermopile including a plurality of thermocouples connected in series so that cold junctions are located on the thick wall portion and hot junctions are located on the thin film portion, wherein a thermosensitive portion is provided in contact with the thick wall portion so that a reference temperature with high accuracy can be used for determining temperature based on output from the thermopile. A PN junction formed on a semiconductor substrate serves as the thermosensitive portion, and it is used to provide for a compact infrared sensing element with high performance at low cost.