公开(公告)号：US20020160150A1

公开(公告)日：2002-10-31

申请号：US10082683

申请日：2002-02-25

申请人： Shin-Kobe Electric Machinery Co., Ltd.

发明人： Katsuji Takahashi ,  Hirokazu Hiraoka ,  Masayuki Noda

IPC分类号： B32B001/00 ,  B29C059/02

CPC分类号： B32B27/12 ,  B24B37/28 ,  B29C70/34 ,  B32B1/00 ,  B32B27/38 ,  B32B37/26 ,  B32B2307/538 ,  B32B2363/00 ,  Y10T428/24355 ,  Y10T442/2418 ,  Y10T442/2475 ,  Y10T442/273 ,  Y10T442/2861 ,  Y10T442/2893 ,  Y10T442/2902 ,  Y10T442/2926 ,  Y10T442/2951 ,  Y10T442/2992 ,  Y10T442/3707 ,  Y10T442/378 ,  Y10T442/3789 ,  Y10T442/3813

摘要： A polished-piece holder is provided that does not easily stick or adsorb to a polishing pad of a polishing apparatus and reduces occurrences of production line troubles and therefore the number of failed polished pieces. A single sheet of a thermosetting resin impregnated fiber substrate or a laminated sheet formed by laminating a plurality of sheets of the thermosetting resin impregnated fiber substrate is formed under heat and pressure into a plate. The thermosetting resin impregnated fiber plate is then processed to form a polished-piece holder for holding pieces to be polished. The evaluation portion has a certain length in a direction of the average line. The thermosetting resin impregnated fiber plate has a surface roughness with a maximum wave height Ry of 10 nullm or greater over an almost entire area of the surface layer. The maximum wave height Ry is determined in an evaluation portion of a wave curve by summing a height Rp of a highest crest and a depth Rv of a deepest trough from an average line of the wave curve. The wave curve is taken from a cross-sectional curve obtained by the surface roughness measuring device.

摘要翻译： 提供了不容易粘附或吸附到抛光装置的抛光垫的抛光片保持器，并且减少了生产线故障的发生，并因此减少了抛光片的数量。 在热和压力下形成一片热固性树脂浸渍纤维基材或通过层叠多片热固性树脂浸渍纤维基材而形成的层压片材。 然后对热固性树脂浸渍的纤维板进行加工，以形成用于保持要抛光的件的抛光片保持件。 评价部在平均线的方向上具有一定的长度。 热固性树脂浸渍纤维板在表面层的几乎整个区域上具有10μm以上的最大波高Ry的表面粗糙度。 通过将最高波峰的高度Rp和最深波谷的深度Rv与波形曲线的平均线相加，在波形曲线的评估部分中确定最大波高Ry。 波形曲线取自由表面粗糙度测量装置获得的横截面曲线。