Method for etching laminated assembly including polyimide layer
    1.
    发明授权
    Method for etching laminated assembly including polyimide layer 有权
    用于蚀刻包括聚酰亚胺层的层压组件的方法

    公开(公告)号:US06783921B2

    公开(公告)日:2004-08-31

    申请号:US10059107

    申请日:2002-01-31

    IPC分类号: G03C176

    摘要: Disclosed is an etching method of a laminated assembly having a metal layer and a non-thermoplastic polyimide layer bonded together via thermoplastic polyimide, which comprises using an etchant at least containing an alkali metal hydroxide, water and oxyalkylamine, wherein the concentrations of the alkali metal hydroxide (X weight %) and of the water (Y weight %) have relationships represented by coordinate points present within a region (inclusive of boundary lines) defined by the following expressions [1] and [2]: Y=(½)X (provided that 7≦X≦45)  [1] Y=({fraction (5/20)})X+17.5 (provided that 7≦X≦45)  [2] provided that X and Y are defined based on the total weight of the alkali metal hydroxide, water and oxyalkylamine expressed as 100.

    摘要翻译: 公开了一种层压组件的蚀刻方法,其具有通过热塑性聚酰亚胺粘合在一起的金属层和非热塑性聚酰亚胺层,其包括使用至少含有碱金属氢氧化物,水和氧烷基胺的蚀刻剂,其中碱金属 氢氧化物(X重量%)和水(Y重量%)具有由以下表达式[1]和[2]限定的区域(包括边界线)内存在的坐标点表示的关系:X和Y为 基于表示为100的碱金属氢氧化物,水和氧化烷基胺的总重量定义。

    Gas Electron Multiplier and Manufacturing Method for Gas Electron Multiplication Foil Used for Same as Well as Radiation Detector Using Gas Electron Multiplier
    2.
    发明申请
    Gas Electron Multiplier and Manufacturing Method for Gas Electron Multiplication Foil Used for Same as Well as Radiation Detector Using Gas Electron Multiplier 有权
    使用气体电子倍增器的气体电子倍增器和制造方法以及使用气体电子倍增器的辐射检测器

    公开(公告)号:US20090084972A1

    公开(公告)日:2009-04-02

    申请号:US12224228

    申请日:2007-03-01

    IPC分类号: G01T1/18 C23F1/00

    CPC分类号: H01J3/025 G01T1/18 H01J47/02

    摘要: To attain objects to reduce the spread of electrons as compared with a conventional one without degrading the multiplication factor of electrons; to provide a large electron multiplication factor; and to improve positional resolution, there is provided a gas electron multiplier using interaction between radiation and gas through photoelectric effects including: a chamber filled with gas and a single gas electron multiplication foil arranged in the chamber wherein the gas electron multiplication foil is made of a plate-like multilayer body composed by having a plate-like insulation layer made of a macromolecular polymer material having a thickness of around 100 μm to 300 μm and flat metal layers overlaid on both surfaces of the insulation layer, and the plate-like multilayer body is provided with a through-hole structure.

    摘要翻译: 为了达到减少电子传播的目的,与常规的相比不会降低电子的倍增因子; 提供大的电子倍增因子; 为了提高位置分辨率,提供了一种通过光电效应使辐射与气体之间的相互作用的气体电子倍增器,包括:充满气体的室和布置在室中的单一气体电子倍增箔,其中气体电子倍增箔由 板状多层体由具有厚度约100μm〜300μm的高分子聚合物材料制成的板状绝缘层和覆盖在绝缘层的两面的平坦的金属层构成,板状多层体 设置有通孔结构。

    Gas electron multiplier and manufacturing method for gas electron multiplication foil used for same as well as radiation detector using gas electron multiplier
    3.
    发明授权
    Gas electron multiplier and manufacturing method for gas electron multiplication foil used for same as well as radiation detector using gas electron multiplier 有权
    气体电子倍增器和用于相同的气体电子倍增箔的制造方法以及使用气体电子倍增器的辐射检测器

    公开(公告)号:US07994483B2

    公开(公告)日:2011-08-09

    申请号:US12224228

    申请日:2007-03-01

    IPC分类号: G01T1/185 G01T1/205 H01J47/00

    CPC分类号: H01J3/025 G01T1/18 H01J47/02

    摘要: To attain objects to reduce the spread of electrons as compared with a conventional one without degrading the multiplication factor of electrons; to provide a large electron multiplication factor; and to improve positional resolution, there is provided a gas electron multiplier using interaction between radiation and gas through photoelectric effects including: a chamber filled with gas and a single gas electron multiplication foil arranged in the chamber wherein the gas electron multiplication foil is made of a plate-like multilayer body composed by having a plate-like insulation layer made of a macromolecular polymer material having a thickness of around 100 μm to 300 μm and flat metal layers overlaid on both surfaces of the insulation layer, and the plate-like multilayer body is provided with a through-hole structure.

    摘要翻译: 为了达到减少电子传播的目的,与常规的相比不会降低电子的倍增因子; 提供大的电子倍增因子; 为了提高位置分辨率,提供了一种通过光电效应使辐射与气体之间的相互作用的气体电子倍增器,包括:充满气体的室和布置在室中的单一气体电子倍增箔,其中气体电子倍增箔由 板状多层体由具有厚度约100μm〜300μm的高分子聚合物材料构成的板状绝缘层和覆盖在绝缘层的两面的平坦的金属层构成,板状多层体 设置有通孔结构。