公开(公告)号：US20080062610A1

公开(公告)日：2008-03-13

申请号：US11835560

申请日：2007-08-08

申请人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI ,  Yukio MIURA ,  Keigo MAKI

发明人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI ,  Yukio MIURA ,  Keigo MAKI

IPC分类号： H01L21/683

CPC分类号： H01L21/6833

摘要： An electrostatic chuck device includes: an electrostatic chuck section including a substrate, which has a main surface serving as a mounting surface on which a plate-like sample is mounted and an electrostatic-adsorption inner electrode built therein, and a power supply terminal for applying a DC voltage to the electrostatic-adsorption inner electrode; and a metal base section that is fixed to the other main surface of the electrostatic chuck section so as to be incorporated into a body and that serves as a high frequency generating electrode. Here, the volume resistivity of the electrostatic-adsorption inner electrode is in the range of 1.0×10−1Ωcm to 1.0×108 Ωcm.

摘要翻译： 静电吸盘装置包括：静电吸盘部，其具有基板，其具有作为安装有板状试样的安装面的主面和内置有静电吸附内部电极的基板，以及用于施加电力的端子 到静电吸附内部电极的DC电压; 以及固定在静电卡盘部的另一个主面上的金属基部，以结合到主体中并作为高频发生电极。 这里，静电吸附内部电极的体积电阻率在1.0×10 -1Ω〜1.0×10 8Ωm的范围内。

公开(公告)号：US20080037195A1

公开(公告)日：2008-02-14

申请号：US11834994

申请日：2007-08-07

申请人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI ,  Yukio MIURA ,  Keigo MAKI

发明人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI ,  Yukio MIURA ,  Keigo MAKI

IPC分类号： H01L21/683 ,  H01L21/00

CPC分类号： H01L21/6833

摘要： An electrostatic chuck device includes an electrostatic chuck section including a substrate and a power supply terminal for applying a DC voltage to an electrostatic-adsorption inner electrode; and a metal base section fixed to the other main surface of the electrostatic chuck section. Here, a concave portion is formed in the main surface of the metal base section facing the electrostatic chuck section and a dielectric plate is fixed to the concave portion. The dielectric plate and the electrostatic chuck section are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric plate and the concave portion are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric constant of the insulating adhesive bonding layer is smaller than that of any one of the dielectric plate and the substrate.

摘要翻译： 静电吸盘装置包括：静电吸盘部，其包括基板和用于向静电吸附内部电极施加直流电压的电源端子; 以及固定在静电吸盘部的另一个主面上的金属基部。 这里，在面向静电卡盘部的金属基部的主面上形成有凹部，电介质板固定在凹部。 电介质板和静电卡盘部分之间插入绝缘粘合剂粘合层彼此粘合。 电介质板和凹部通过绝缘性粘合剂层粘合而彼此接合。 绝缘粘合剂接合层的介电常数小于介质板和基板中的任何一种的介电常数。

公开(公告)号：US20080062611A1

公开(公告)日：2008-03-13

申请号：US11835743

申请日：2007-08-08

申请人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI ,  Yukio MIURA ,  Keigo MAKI

发明人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI ,  Yukio MIURA ,  Keigo MAKI

IPC分类号： H01L21/683

CPC分类号： H01L21/6833

摘要： An electrostatic chuck device includes an electrostatic chuck section, a metal base section, and a dielectric plate. The electrostatic chuck section has a substrate, a main surface of which serves as a mounting surface for a plate-like sample, an electrostatic-adsorption inner electrode built in the substrate, and a power supply terminal for applying a DC voltage to the electrostatic-adsorption inner electrode. Here, a dielectric plate is fixed to a concave portion formed in the metal base section. The dielectric plate and the electrostatic chuck section are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric plate and the concave portion are adhesively bonded to each other with a conductive adhesive bonding layer interposed therebetween, the volume resistivity of which is 1.0×10−2Ωcm or less.

摘要翻译： 静电吸盘装置包括静电吸盘部，金属基部和电介质板。 静电吸盘部具有基板，其主面作为板状试样的安装面，内置于基板的静电吸附内部电极，以及向静电吸引部施加直流电压的电源端子， 吸附内电极。 这里，电介质板被固定到形成在金属基部中的凹部。 电介质板和静电卡盘部分之间插入绝缘粘合剂粘合层彼此粘合。 电介质板和凹部通过导电性粘合剂层彼此粘合，体积电阻率为1.0×10 -2Ω·cm以下。

公开(公告)号：US20080062609A1

公开(公告)日：2008-03-13

申请号：US11834957

申请日：2007-08-07

申请人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI

发明人： Shinji HIMORI ,  Shoichiro MATSUYAMA ,  Atsushi MATSUURA ,  Hiroshi INAZUMACHI ,  Mamoru KOSAKAI

IPC分类号： H01L21/683

CPC分类号： H01L21/6833

摘要： An electrostatic chuck device includes: an electrostatic chuck section including a substrate, which has a main surface serving as a mounting surface on which a plate-like sample is mounted and an electrostatic-adsorption inner electrode built therein, and a power supply terminal for applying a DC voltage to the electrostatic-adsorption inner electrode; and a metal base section that is fixed to the other main surface of the electrostatic chuck section so as to be incorporated into a body and that serves as a high frequency generating electrode. Here, the electrostatic-adsorption inner electrode has one or more electrode portions, and a resistance value of a distance between a point corresponding to a center axis of the substrate or a point closest to the center axis and a point most distant from the center axis among distances between two points in the electrode portion is in the range of 102Ω to 1010Ω.

摘要翻译： 静电吸盘装置包括：静电吸盘部，其具有基板，其具有作为安装有板状试样的安装面的主面和内置有静电吸附内部电极的基板，以及用于施加电力的端子 到静电吸附内部电极的DC电压; 以及固定在静电卡盘部的另一个主面上的金属基部，以结合到主体中并作为高频发生电极。 这里，静电吸附内电极具有一个或多个电极部分，并且与基板的中心轴线相对应的点或最靠近中心轴线的点之间的距离的电阻值和最远离中心轴线的点 在电极部分的两点之间的距离之间的距离在10欧姆到10微米的范围内。

公开(公告)号：US20080311510A1

公开(公告)日：2008-12-18

申请号：US12163297

申请日：2008-06-27

申请人： Atsushi MATSUURA ,  Hirokazu Sawada ,  Akio Uesugi

发明人： Atsushi MATSUURA ,  Hirokazu Sawada ,  Akio Uesugi

IPC分类号： G03F7/00

CPC分类号： B41N3/034 ,  C25F3/04

摘要： A lithographic printing plate support includes a surface which has a surface area ratio ΔS5(0.02-0.2) defined by formula (1): ΔS5(0.02-0.2)(%)=[(Sx5(0.02-0.2)−S0)/S0]×100(%) (Sx5(0.02-0.2)  (1) is the true surface area of a 5 μm square surface region as determined by three-point approximation based on data obtained by extracting 0.02 to 0.2 μm wavelength components from three-dimensional data on the surface region measured with an atomic force microscope at 512×512 points and S0 is the geometrically measured surface area of the surface region) of 50 to 90%; and an arithmetic average roughness Ra of 0.35 μm or less. The lithographic printing plate support can be used to obtain a presensitized plate, which exhibits both an excellent scumming resistance and a particularly long press life when being made into a lithographic printing plate.

摘要翻译： 平版印刷版支撑体包括具有由公式（1）定义的表面积比DeltaS5（0.02-0.2）的表面：<？in-line-formula description =“In-line Formulas”end =“lead”？> DeltaS5 （0.02-0.2）（％）= [（Sx5（0.02-0.2）-S0）/ S0]×100（％）（Sx5（0.02-0.2）（1）<βin-line-formula description =“In-line 公式“end =”tail“？>是基于由测量的表面区域上的三维数据提取0.02至0.2mum波长分量而获得的数据通过三点近似确定的5um方形表面区域的真实表面积 原子力显微镜为512x512点，S0为表面区域的几何测量表面积）为50〜90％; 算术平均粗糙度Ra为0.35μm以下。 平版印刷版支撑体可以用于获得预制板，当制成平版印刷版时，它们具有优异的防浮渣性和特别长的印刷寿命。

公开(公告)号：US20090050490A1

公开(公告)日：2009-02-26

申请号：US12025100

申请日：2008-02-04

申请人： Atsushi MATSUURA ,  Hirokazu Sawada ,  Akio Uesugi

发明人： Atsushi MATSUURA ,  Hirokazu Sawada ,  Akio Uesugi

IPC分类号： C25F3/04

CPC分类号： B41N1/08 ,  B41N1/083 ,  B41N3/03 ,  C25F3/04

摘要： Disclosed is a support for a lithographic printing plate which, when measured over a 400 μm×400 μm surface region thereon using a three-dimensional non-contact roughness tester, has at most 5.0 convex portions of a height from centerline of at least 0.70 μm and an equivalent circle diameter of at least 20 μm, and has at least 800 concave portions of a depth from centerline of at least 0.50 μm and an equivalent circle diameter of at least 2.0 μm. Presensitized plates which are obtainable by using the support for a lithographic printing plate according to the present invention have an excellent scumming resistance and an extremely long press life.

摘要翻译： 公开了一种平版印刷版的支持体，当使用三维非接触粗糙度测试仪在其400μmx400μm的表面区域上测量时，其中心线的至少5.0个凸起部分的中心线至少为0.70μm， 至少20um的当量圆直径，并且具有至少800个从至少0.50μm的中心线的深度到至少2.0μm的凹部。 通过使用根据本发明的平版印刷版的支撑体可获得的致敏板具有优异的防浮渣性和极长的印刷寿命。

公开(公告)号：US20200015007A1

公开(公告)日：2020-01-09

申请号：US16490825

申请日：2018-03-14

申请人： Atsushi MATSUURA

发明人： Atsushi MATSUURA

IPC分类号： H04R3/00 ,  H04R1/40

摘要： An apparatus, system, and method, each of which: acquires sound data generated from a plurality of sound signals collected at a plurality of microphones; acquires, from one or more sensors, a result of detecting a position of the sound recording apparatus at a time point during a time period when the plurality of sound signals is collected; and stores, in a memory, position data indicating the position of the sound recording apparatus detected at the time point, and sound data generated based on a plurality of sound signals collected at the microphones at the time point at which the position was detected, in association with each other.