公开(公告)号：US5489985A

公开(公告)日：1996-02-06

申请号：US181586

申请日：1994-01-14

申请人： Shohroh Mochida ,  Tomohiro Kimura ,  Osamu Yamada ,  Yuji Ono ,  Hidenori Nagata

发明人： Shohroh Mochida ,  Tomohiro Kimura ,  Osamu Yamada ,  Yuji Ono ,  Hidenori Nagata

IPC分类号： G01N21/88 ,  G01R31/04 ,  G01R31/28 ,  G01R31/309 ,  G01B11/00 ,  H01J3/14

CPC分类号： G01N21/88 ,  G01R31/309 ,  G01R31/04 ,  G01R31/2813

摘要： There is provided an apparatus of inspecting a packaged state by scanning a packaged printed circuit board with a fine light beam and detecting reflection beams of the fine light beam in a plurality of directions. A fine light beam emitted from a light source is scanned on the packaged printed circuit board substantially vertically thereto by means of a polygon mirror and a light projection f.theta. lens. An optical path correcting system receives reflection beams scattered from the packaged printed circuit board and corrects optical paths of the reflection beams. The correction is done in such a way that reflection beams having constant directional vectors regardless of the change of the scanning position of the fine light beam are received and guided to light receiving positions complying with a height at a scanning position on a plurality of photoelectric conversion devices. Through this, the packaged state of parts is inspected at a high speed, with high accuracy and over a wide range without expanding the light receiving area of the photoelectric conversion device and without causing characteristics of triogonometrical survey to change with the scanning position.

摘要翻译： 提供了一种通过用精细光束扫描封装的印刷电路板并且检测多个方向上的精细光束的反射光来检查封装状态的装置。 通过多面反射镜和光投射光圈透镜在基板垂直于其上的印刷电路板上扫描从光源发射的精细光束。 光路校正系统接收从封装的印刷电路板散射的反射光束并校正反射光束的光路。 以这样的方式进行校正，使得具有恒定方向向量的反射光束与精细光束的扫描位置的变化无关地被接收并被引导到符合多个光电转换处的扫描位置处的高度的光接收位置 设备。 通过这种方式，在不扩大光电转换装置的光接收面积的同时，以高精度和大范围的高速度检查部件的封装状态，并且不会导致三角测量的特征随扫描位置而变化。