公开(公告)号：US11036898B2

公开(公告)日：2021-06-15

申请号：US16352776

申请日：2019-03-13

申请人： KLA-Tencor Corporation

发明人： Houssam Chouaib ,  Alexander Kuznetsov

IPC分类号： G01R31/308 ,  G06F30/17 ,  G01R31/309

摘要： Methods and systems for generating measurement models of nanowire based semiconductor structures based on re-useable, parametric models are presented herein. Metrology systems employing these models are configured to measure structural and material characteristics (e.g., material composition, dimensional characteristics of structures and films, etc.) associated with nanowire semiconductor fabrication processes. The re-useable, parametric models of nanowire based semiconductor structures enable measurement model generation that is substantially simpler, less error prone, and more accurate. As a result, time to useful measurement results is significantly reduced, particularly when modelling complex, nanowire based structures. The re-useable, parametric models of nanowire based semiconductor structures are useful for generating measurement models for both optical metrology and x-ray metrology, including soft x-ray metrology and hard x-ray metrology.

公开(公告)号：US10670656B2

公开(公告)日：2020-06-02

申请号：US15452933

申请日：2017-03-08

申请人： International Business Machines Corporation

发明人： Paul S. Andry ,  Qianwen Chen ,  Bing Dang ,  John U. Knickerbocker ,  Minhua Lu ,  Robert J. Polastre ,  Bucknell C. Webb

IPC分类号： G01R31/309 ,  H05K3/30 ,  G01R31/28 ,  H05K1/02 ,  H05K1/18

摘要： An electro-optical module assembly is provided that includes a flexible substrate having a first surface and a second surface opposite the first surface, wherein the flexible substrate contains an opening located therein that extends from the first surface to the second surface. An optical component is located on the second surface of the flexible substrate and is positioned to have a surface exposed by the opening. At least one electronic component is located on a first portion of the first surface of the flexible substrate, and at least one micro-energy source is located on a second portion of the first surface of the flexible substrate.

公开(公告)号：US10330706B2

公开(公告)日：2019-06-25

申请号：US15314702

申请日：2014-06-04

申请人： TELEFONAKTIEBOLAGET LM ERICSSON (PUBL)

发明人： Sverker Sander ,  Björn Olsson

IPC分类号： G01R13/04 ,  G08C19/36 ,  G08C23/04 ,  H04Q9/00 ,  G01R31/28 ,  G01R31/302 ,  G01R31/309

摘要： The present invention relates to a system, a measurement probe and a method for measuring an electrical property of an electrical circuit, comprising measuring the electrical property by means of a measurement probe connected to the electrical circuit, converting the measured electrical property of the electrical circuit to an optical signal. The method further comprises sending the optical signal, and receiving the optical signal by means of an image sensor configured to record images comprising the measurement probe that transmits the optical signal. The method further comprises processing the recorded images in order to decode the measurement data from the received optical signal.

公开(公告)号：US09773440B2

公开(公告)日：2017-09-26

申请号：US15082119

申请日：2016-03-28

申请人： Xiamen Tianma Micro-electronics Co., Ltd. ,  Tianma Micro-electronics Co., Ltd.

发明人： Huasheng Yan

IPC分类号： G01R31/28 ,  G01R31/304 ,  G01R31/306 ,  G01R31/309 ,  G09G3/00 ,  G09G3/20

CPC分类号： G09G3/006 ,  G09G3/2003 ,  G09G2300/0426 ,  G09G2320/0233 ,  G09G2320/0295

摘要： A display panel, a display device and an inspection method are provided. The display panel comprises a plurality of scanning lines, a plurality of data lines including a plurality of first-type data lines and a plurality of second-type data lines, and a plurality of sub-pixels arranged in an array. The second-type data lines are closer to a center of the display panel than the first-type data lines along a first direction. The first-type data line is connected to at least one second-type data line, and the connected first-type data line and the at least one second-type data line are connected to the sub-pixels having a same color in a same sub-pixel row, respectively. The first-type data line receives a voltage signal from an external circuit, and the at least one second-type data line receives the voltage signal from the connected first-type data line.

公开(公告)号：US09091725B2

公开(公告)日：2015-07-28

申请号：US12829996

申请日：2010-07-02

申请人： Joong-Ki Jeong ,  Yu-Jin Lee ,  Seung-Jun Lee ,  Bong-Ha Hwang

发明人： Joong-Ki Jeong ,  Yu-Jin Lee ,  Seung-Jun Lee ,  Bong-Ha Hwang

IPC分类号： G01B11/24 ,  G01R31/309 ,  G01B11/25 ,  G06T7/00 ,  G06K9/00 ,  G06K9/46 ,  G01R31/00

CPC分类号： G01R31/309 ,  G01B11/2531 ,  G06T7/521

摘要： An inspection method includes photographing a measurement target to acquire image data for each pixel of the measurement target, acquiring height data for each pixel of the measurement target, acquiring visibility data for each pixel of the measurement target, multiplying the acquired image data by at least one of the height data and the visibility data for each pixel to produce a result value, and setting a terminal area by using the produced result value. Thus, the terminal area may be accurately determined.

摘要翻译： 检查方法包括拍摄测量对象以获取测量对象的每个像素的图像数据，获取测量对象的每个像素的高度数据，获取测量对象的每个像素的可见度数据，至少将所获取的图像数据乘以 为每个像素生成结果值的高度数据和可见度数据之一，以及通过使用所产生的结果值来设置终端区域。 因此，终端区域可以被准确地确定。

公开(公告)号：US08946658B2

公开(公告)日：2015-02-03

申请号：US13444349

申请日：2012-04-11

申请人： Thierry Huque ,  Jean-Louis Modave

发明人： Thierry Huque ,  Jean-Louis Modave

IPC分类号： G01R31/309 ,  G01R31/308 ,  G01R31/28 ,  G01R31/00 ,  G01R31/311 ,  G01R31/317

CPC分类号： G01R31/308 ,  G01R31/002 ,  G01R31/2881 ,  G01R31/311 ,  G01R31/31719

摘要： A system for injecting faults by laser beams into an electronic circuit including: at least two lasers capable of emitting approximately parallel beams; at least one optical system receiving, on the magnifying side, the beams; and a support of the integrated circuit placed on the reducing side of the optical system.

摘要翻译： 一种用于通过激光束将故障注入电子电路的系统，包括：至少两个能够发射大致平行光束的激光器; 至少一个光学系统，在所述放大侧上接收所述光束; 以及放置在光学系统的减少侧的集成电路的支撑。

公开(公告)号：US08407657B2

公开(公告)日：2013-03-26

申请号：US13427532

申请日：2012-03-22

申请人： Mark A. Dickson ,  Edward J. Collins ,  Robert Gregory Jukna

发明人： Mark A. Dickson ,  Edward J. Collins ,  Robert Gregory Jukna

IPC分类号： G06F11/22 ,  G06F17/50 ,  G01R31/304 ,  G01R31/306 ,  G01R31/309

CPC分类号： G01R1/07371 ,  G01R31/2808

摘要： A system for testing an electronic circuit board (ECB) having a plurality of test points in a pre-defined arrangement on a measurement device having a plurality of resources includes an interface fixture having a plurality of contact pads arranged in an array on a first surface. The contact pads can be electrically coupled to the plurality of resources of the measurement system according to a pre-defined pattern, where at least two of the contact pads are electrically coupled to one of the plurality of resources in a many-to-one relationship. The system also includes a test fixture removably attached to the first surface of the interface fixture. The test fixture includes an upper probe plate having a plurality of openings and a lower probe plate parallel to the upper probe plate. The lower probe plate includes a plurality of openings associated with the openings in the upper probe plate.

摘要翻译： 一种用于测试在具有多个资源的测量装置上具有预定布置的多个测试点的电子电路板（ECB）的系统，包括：接口固定装置，具有在第一表面上排列成阵列的多个接触焊盘 。 接触焊盘可以根据预定义的图案电耦合到测量系统的多个资源，其中至少两个接触焊盘以多对一关系电耦合到多个资源之一 。 该系统还包括可拆卸地附接到接口夹具的第一表面的测试夹具。 测试夹具包括具有多个开口的上探针板和平行于上探针板的下探针板。 下探针板包括与上探针板中的开口相关联的多个开口。

公开(公告)号：US08035409B2

公开(公告)日：2011-10-11

申请号：US12432082

申请日：2009-04-29

申请人： Alina Deutsch ,  George A. Katopis ,  Gerard V. Kopcsay ,  Roger S. Krabbenhoft ,  Christopher W. Surovic

发明人： Alina Deutsch ,  George A. Katopis ,  Gerard V. Kopcsay ,  Roger S. Krabbenhoft ,  Christopher W. Surovic

IPC分类号： G01R31/304 ,  G01R31/306 ,  G01R31/309 ,  G06F11/30

CPC分类号： G01R31/2818 ,  G01R31/2822

摘要： A system and method for performing a test for characterizing high frequency operation of PCB boards. More particularly, a system and methodology is provided to implement a time-domain short pulse propagation (SPP) technique on the production line, on large, multi-layer, product-level PCB boards, for large volume testing, by people who are not familiar with advanced, delicate, measurement techniques, who need robust test facilities, and cannot afford the time or expense of other lab-type approaches.

摘要翻译： 一种执行PCB板高频运行特性测试的系统和方法。 更具体地，提供了一种系统和方法，用于在生产线上，在大型，多层，产品级PCB板上实施时域短脉冲传播（SPP）技术，用于大容量测试，由不是 熟悉先进，精细，测量技术，需要强大的测试设施，无法承担其他实验室方法的时间或费用。

公开(公告)号：US6154038A

公开(公告)日：2000-11-28

申请号：US859266

申请日：1997-05-20

申请人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

发明人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

IPC分类号： G01R31/02 ,  G01R31/302 ,  G01R31/309 ,  H01L21/66

CPC分类号： G01R31/309

摘要： An apparatus for testing a circuit board has a holder for holding the circuit board, a detector for detecting the electrical characteristics of the circuit board, and a controller for controlling laser plasma switches. The detector has a path forming unit positioned away from the circuit board by a predetermined gap. The path forming unit forms a first conductive path between a position corresponding to a first test pad on a trace of the circuit board and a first power source, as well as a second conductive path between a position corresponding to a second test pad on another trace of the circuit board and a second power source. The controller emits a laser beam to a first space between the first test pad and the first conductive path and another laser beam toward a second space between the second test pad and the second conductive path, to make the first and second spaces conductive. The detector has a sampler connected to one of the first and second conductive paths, to sample electrical characteristic values of the circuit board.

公开(公告)号：US6081613A

公开(公告)日：2000-06-27

申请号：US518812

申请日：1995-08-24

申请人： Kazuhiro Ikurumi ,  Masanori Yasutake ,  Osamu Nakao ,  Masaharu Tsujimura ,  Toshihiko Tsujikawa ,  Kenji Okamoto

发明人： Kazuhiro Ikurumi ,  Masanori Yasutake ,  Osamu Nakao ,  Masaharu Tsujimura ,  Toshihiko Tsujikawa ,  Kenji Okamoto

IPC分类号： G01N21/88 ,  G01N21/956 ,  G01R31/28 ,  G01R31/309 ,  G06T7/00 ,  H05K3/00 ,  H05K13/08 ,  G06K9/00

CPC分类号： G06T7/001 ,  G01R31/309 ,  G01R31/2813 ,  G06T2207/30141

摘要： A motion of a printed circuit board (1) is detected by an encoder (4) arranged aside a belt conveyer (2), and the encoder generates a detection signal (S.sub.3) which activates a timing signal generator unit (5) for generating an image pickup start timing signal which is fed to a time measuring unit (6) for measuring the image storing time which corresponds to the time interval of the image pickup start signal (S1). According to the image storing time, the image signal (S2) generated by the line CCD camera (3) is normalized by the normalizing calculation means (7), and thereafter, the mounting condition of the printed circuit board is judged by the image recognizing section (B) with the use of the image data (D) to thereby realize a simple and convenient mechanism at a low cost and at a high precision.