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    Measurement models of nanowire semiconductor structures based on re-useable sub-structures
    2.
    发明授权
    Measurement models of nanowire semiconductor structures based on re-useable sub-structures 有权

    公开(公告)号：US11036898B2

    公开(公告)日：2021-06-15

    申请号：US16352776

    申请日：2019-03-13

    申请人： KLA-Tencor Corporation

    发明人： Houssam Chouaib ,  Alexander Kuznetsov

    IPC分类号： G01R31/308 ,  G06F30/17 ,  G01R31/309

    摘要： Methods and systems for generating measurement models of nanowire based semiconductor structures based on re-useable, parametric models are presented herein. Metrology systems employing these models are configured to measure structural and material characteristics (e.g., material composition, dimensional characteristics of structures and films, etc.) associated with nanowire semiconductor fabrication processes. The re-useable, parametric models of nanowire based semiconductor structures enable measurement model generation that is substantially simpler, less error prone, and more accurate. As a result, time to useful measurement results is significantly reduced, particularly when modelling complex, nanowire based structures. The re-useable, parametric models of nanowire based semiconductor structures are useful for generating measurement models for both optical metrology and x-ray metrology, including soft x-ray metrology and hard x-ray metrology.

    Board inspection apparatus and method
    6.
    发明授权
    Board inspection apparatus and method 有权
    板检查装置及方法

    公开(公告)号：US09091725B2

    公开(公告)日：2015-07-28

    申请号：US12829996

    申请日：2010-07-02

    申请人： Joong-Ki Jeong ,  Yu-Jin Lee ,  Seung-Jun Lee ,  Bong-Ha Hwang

    发明人： Joong-Ki Jeong ,  Yu-Jin Lee ,  Seung-Jun Lee ,  Bong-Ha Hwang

    IPC分类号： G01B11/24 ,  G01R31/309 ,  G01B11/25 ,  G06T7/00 ,  G06K9/00 ,  G06K9/46 ,  G01R31/00

    CPC分类号： G01R31/309 ,  G01B11/2531 ,  G06T7/521

    摘要： An inspection method includes photographing a measurement target to acquire image data for each pixel of the measurement target, acquiring height data for each pixel of the measurement target, acquiring visibility data for each pixel of the measurement target, multiplying the acquired image data by at least one of the height data and the visibility data for each pixel to produce a result value, and setting a terminal area by using the produced result value. Thus, the terminal area may be accurately determined.

    摘要翻译： 检查方法包括拍摄测量对象以获取测量对象的每个像素的图像数据，获取测量对象的每个像素的高度数据，获取测量对象的每个像素的可见度数据，至少将所获取的图像数据乘以 为每个像素生成结果值的高度数据和可见度数据之一，以及通过使用所产生的结果值来设置终端区域。 因此，终端区域可以被准确地确定。

    Flexible test fixture
    8.
    发明授权
    Flexible test fixture 失效
    灵活的测试夹具

    公开(公告)号：US08407657B2

    公开(公告)日：2013-03-26

    申请号：US13427532

    申请日：2012-03-22

    申请人： Mark A. Dickson ,  Edward J. Collins ,  Robert Gregory Jukna

    发明人： Mark A. Dickson ,  Edward J. Collins ,  Robert Gregory Jukna

    IPC分类号： G06F11/22 ,  G06F17/50 ,  G01R31/304 ,  G01R31/306 ,  G01R31/309

    CPC分类号： G01R1/07371 ,  G01R31/2808

    摘要： A system for testing an electronic circuit board (ECB) having a plurality of test points in a pre-defined arrangement on a measurement device having a plurality of resources includes an interface fixture having a plurality of contact pads arranged in an array on a first surface. The contact pads can be electrically coupled to the plurality of resources of the measurement system according to a pre-defined pattern, where at least two of the contact pads are electrically coupled to one of the plurality of resources in a many-to-one relationship. The system also includes a test fixture removably attached to the first surface of the interface fixture. The test fixture includes an upper probe plate having a plurality of openings and a lower probe plate parallel to the upper probe plate. The lower probe plate includes a plurality of openings associated with the openings in the upper probe plate.

    摘要翻译： 一种用于测试在具有多个资源的测量装置上具有预定布置的多个测试点的电子电路板（ECB）的系统，包括：接口固定装置，具有在第一表面上排列成阵列的多个接触焊盘 。 接触焊盘可以根据预定义的图案电耦合到测量系统的多个资源，其中至少两个接触焊盘以多对一关系电耦合到多个资源之一 。 该系统还包括可拆卸地附接到接口夹具的第一表面的测试夹具。 测试夹具包括具有多个开口的上探针板和平行于上探针板的下探针板。 下探针板包括与上探针板中的开口相关联的多个开口。

    Apparatus and method for testing circuit board
    10.
    发明授权
    Apparatus and method for testing circuit board 失效

    公开(公告)号：US6154038A

    公开(公告)日：2000-11-28

    申请号：US859266

    申请日：1997-05-20

    申请人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

    发明人： Akio Ito ,  Kazuyuki Ozaki ,  Kazuhiro Nakazawa

    IPC分类号： G01R31/02 ,  G01R31/302 ,  G01R31/309 ,  H01L21/66

    CPC分类号： G01R31/309

    摘要： An apparatus for testing a circuit board has a holder for holding the circuit board, a detector for detecting the electrical characteristics of the circuit board, and a controller for controlling laser plasma switches. The detector has a path forming unit positioned away from the circuit board by a predetermined gap. The path forming unit forms a first conductive path between a position corresponding to a first test pad on a trace of the circuit board and a first power source, as well as a second conductive path between a position corresponding to a second test pad on another trace of the circuit board and a second power source. The controller emits a laser beam to a first space between the first test pad and the first conductive path and another laser beam toward a second space between the second test pad and the second conductive path, to make the first and second spaces conductive. The detector has a sampler connected to one of the first and second conductive paths, to sample electrical characteristic values of the circuit board.