公开(公告)号：US20140002887A1

公开(公告)日：2014-01-02

申请号：US13782527

申请日：2013-03-06

Applicant: Silicon Light Machines Corporation

Inventor： Michael Yeung

IPC: G02B26/00

CPC classification number: G02B26/00 ,  G02B26/0808 ,  G09G3/2011 ,  G09G3/3473 ,  G09G2300/0426 ,  G09G2310/0272

Abstract: A spatial light modulator (SLM) module and methods of designing, manufacturing and using the same are provided. In one embodiment, the SLM module comprises a diffractive, diffractive SLM formed on a substrate, the SLM including a plurality of pixels each including a plurality of electrostatically deflectable actuators, and a driver including a number of drive channels each coupled to one of the plurality of electrostatically deflectable actuators. Each of the drive channels include at least one internal digital-to-analog converter (DAC) integrally formed on the same substrate as the SLM. In one embodiment, the DAC is a multi-slope charge integrating DAC. In other embodiments, the driver includes circuitry to test each of the drive channels, and a spare drive channel that can be switched in to replace a defective drive channel.

Abstract translation: 提供了空间光调制器（SLM）模块及其设计，制造和使用的方法。 在一个实施例中，SLM模块包括形成在衬底上的衍射衍射SLM，SLM包括多个像素，每个像素包括多个可静电偏转的致动器，以及驱动器，其包括多个驱动通道，每个驱动通道耦合到多个 的静电偏转致动器。 每个驱动通道包括与SLM一体形成在同一衬底上的至少一个内部数模转换器（DAC）。 在一个实施例中，DAC是多斜率电荷积分DAC。 在其他实施例中，驱动器包括用于测试每个驱动通道的电路和可以被切换以替换有缺陷的驱动通道的备用驱动通道。

公开(公告)号：US20170269350A1

公开(公告)日：2017-09-21

申请号：US15071096

申请日：2016-03-15

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Hyung KYU Lee ,  Alexander Payne ,  Michael Yeung

IPC: G02B26/00 ,  H02N1/00

CPC classification number: G02B26/001 ,  G02B26/0841 ,  G09G3/346 ,  G09G2310/0275

Abstract: A circuit and method for driving electrostatic microelectomechanical systems (MEMS) are provided. In one embodiment, the circuit includes a first electrode in a movable element of the MEMS and a second electrode on a surface of a substrate of the MEMS over which the movable element is suspended, and a driver electrically coupled to the first and the second electrodes. The driver supplies a voltage differential between the first and second electrodes to vary an electrostatic force between the electrodes thereby moving the movable element. The driver is configured to supply a voltage pulse having a leading edge in which a first voltage intermediate between an initial, minimum voltage and a maximum voltage is maintained for a first time before rising to the maximum voltage timed to dampen oscillations of the movable element. Other embodiments are also described.

公开(公告)号：US09395531B2

公开(公告)日：2016-07-19

申请号：US13782527

申请日：2013-03-06

Applicant: Silicon Light Machines Corporation

Inventor： Michael Yeung

IPC: G09G3/34 ,  G02B26/00 ,  G02B26/08 ,  G09G3/20

CPC classification number: G02B26/00 ,  G02B26/0808 ,  G09G3/2011 ,  G09G3/3473 ,  G09G2300/0426 ,  G09G2310/0272

Abstract: A spatial light modulator (SLM) module and methods of designing, manufacturing and using the same are provided. In one embodiment, the SLM module comprises a diffractive, diffractive SLM formed on a substrate, the SLM including a plurality of pixels each including a plurality of electrostatically deflectable actuators, and a driver including a number of drive channels each coupled to one of the plurality of electrostatically deflectable actuators. Each of the drive channels include at least one internal digital-to-analog converter (DAC) integrally formed on the same substrate as the SLM. In one embodiment, the DAC is a multi-slope charge integrating DAC. In other embodiments, the driver includes circuitry to test each of the drive channels, and a spare drive channel that can be switched in to replace a defective drive channel.

Abstract translation: 提供了空间光调制器（SLM）模块及其设计，制造和使用的方法。 在一个实施例中，SLM模块包括形成在衬底上的衍射衍射SLM，SLM包括多个像素，每个像素包括多个可静电偏转的致动器，以及驱动器，其包括多个驱动通道，每个驱动通道耦合到多个 的静电偏转致动器。 每个驱动通道包括与SLM一体形成在同一衬底上的至少一个内部数模转换器（DAC）。 在一个实施例中，DAC是多斜率电荷积分DAC。 在其他实施例中，驱动器包括用于测试每个驱动通道的电路和可以被切换以替换有缺陷的驱动通道的备用驱动通道。