-
公开(公告)号：US6157450A
公开(公告)日：2000-12-05
申请号：US37202
申请日：1998-03-09
申请人： Silvio P. Marchese-Ragona , Robert Bryant , Matthew E. Seelig , Dag Lindquist , Donald P. McClimans , Edward J. Merritt, Jr. , John E. Stephan , John A. Teleska
发明人： Silvio P. Marchese-Ragona , Robert Bryant , Matthew E. Seelig , Dag Lindquist , Donald P. McClimans , Edward J. Merritt, Jr. , John E. Stephan , John A. Teleska
CPC分类号： G01B11/306
摘要： A fully automated surface profiling system having a loading chamber and an adjacent measurement chamber containing a phase differential laser optical scanning system and a five-axis positioner having a vacuum chuck for holding and orienting a wafer for surface profile measurement. The positioner can displace a mounted wafer lengthwise and crosswise of the chamber, can rotate the wafer about vertical and horizontal axes through the positioner, and can rotate the wafer about its own axis. Each motion is motor-driven and can be carried out independently of all the others or in compound motion as needed. The positioner can accommodate a series of replaceable chucks for holding wafers of different diameters. The loading chamber has a cassette dock for receiving a cassette containing wafers to be tested, a robotic server, and a prealigner. All operations within the profilometer are controlled by a programmable CPU at a control station. Test results and analysis can be displayed on an onboard monitor or printed out or stored or transmitted. In operation, the robotic server selects a wafer from the cassette, presents the wafer to the prealigner for centering and orientation, and transfers the wafer through a slot into the measurement chamber and installs the wafer on the positioner for measurement. The positioner orients the wafer responsive to program commands from the CPU, and the desired surface profile measurements are made. When all measurements have been completed on a wafer, the robotic server removes the wafer from the positioner, returns it to the cassette, and selects another wafer for testing.
摘要翻译： 一种完全自动化的表面轮廓系统，具有装载室和相邻的测量室，其包含相位差激光光学扫描系统和具有用于保持和定向用于表面轮廓测量的晶片的真空卡盘的五轴定位器。 定位器可以沿着室的纵向和横向移位安装的晶片，可以使晶片围绕垂直和水平轴旋转通过定位器，并且可以围绕其自身的轴线旋转晶片。 每个运动都是电机驱动的，可以根据需要独立于其他运动或复合运动进行运动。 定位器可以容纳一系列用于保持不同直径的晶片的可替换卡盘。 装载室具有用于接收包含要测试的晶片的盒的盒式基座，机器人服务器和预对准器。 轮廓仪内的所有操作由控制台上的可编程CPU控制。 测试结果和分析可以显示在车载显示器上，或打印出来或存储或传输。 在操作中，机器人服务器从盒子中选择晶片，将晶片呈现给预对准器进行定心和取向，并将晶片通过狭槽传送到测量室中，并将晶片安装在定位器上用于测量。 定位器响应于来自CPU的程序命令来定向晶片，并且进行所需的表面轮廓测量。 当所有测量在晶片上完成时，机器人服务器从定位器中取出晶片，将其返回到盒子，并选择另一个晶片进行测试。
-
2.发明授权Breakaway/crash detection system for use with a fixture on a coordinate measurement machine 有权用于坐标测量机上的夹具的分离/碰撞检测系统公开(公告)号：US07520187B2
公开(公告)日：2009-04-21
申请号：US11313701
申请日：2005-12-20
CPC分类号： G01B21/16
摘要： A breakaway unit sits atop a base plate of a coordinate measuring machine via a breakaway coupling system. A crash detection system including at least one crash detection sensor mounted on the breakaway unit and a crash detection controller stops the machine when vertical movement of the breakaway unit exceeds a threshold. Should collision occur, the breakaway coupling system allows the breakaway unit to separate from the base plate, preventing damage to instruments mounted thereon. The kinematic coupling system preferably comprises tooling balls engaging respective vee cones, vee grooves, and/or flats.
摘要翻译： 分离单元通过分离耦合系统坐在坐标测量机的底板上。 一种碰撞检测系统，包括安装在分离单元上的至少一个碰撞检测传感器和碰撞检测控制器，当分离单元的垂直移动超过阈值时，停机。 如果发生碰撞，分离联轴器系统允许分离单元与基板分离，防止对安装在其上的仪器造成损坏。 运动耦合系统优选地包括与相应的视锥，V形槽和/或平面接合的工具球。
-
公开(公告)号：US5017012A
公开(公告)日：1991-05-21
申请号：US389430
申请日：1989-08-04
IPC分类号： G01B11/30
CPC分类号： G01B11/306
摘要： A previewing profiler includes apparatus to scan the surface of an object and to provide a display relating to the smoothness of the surface at a microscopic level. The system includes providing a polarized collimated laser beam through a Nomarski type prism and focusing the resulting beams on the surface to be scanned. The system further includes a user operable rotatable mirror which may be inserted, upon operator command, between the laser and Nomarski prism, which mirror is designed to leak a small percentage of the laser light. Another source of noncollimated polarized light, provided through a condensing lens, is provided to the rotatable mirror to be directed along the same path through the Nomarski prism and to be focused at a point above the surface being scanned, thereby providing a substantially larger illuminated area on the surface. The reflected light from both the laser beam and additional noncollimated light is focused on a CCD array and then displayed on a display. This permits the user to view the area to be profiled, including the profile line, prior to operating the profiler.
摘要翻译： 预览轮廓仪包括扫描对象表面的装置，并提供与微观层面上的表面平滑度有关的显示。 该系统包括通过Nomarski型棱镜提供偏振的准直激光束，并将得到的光束聚焦在待扫描的表面上。 该系统还包括用户可操作的可旋转反射镜，其可以根据操作者的命令在激光和Nomarski棱镜之间插入，该反射镜被设计为泄漏一小部分激光。 通过聚光透镜提供的另一非准直偏振光源被提供给可旋转反射镜，以沿着通过Nomarski棱镜的相同路径被引导并且被聚焦在被扫描的表面上方，从而提供大得多的照明区域 在表面上。 来自激光束和附加的非准直光的反射光聚焦在CCD阵列上，然后显示在显示器上。 这允许用户在操作分析器之前查看要分析的区域，包括轮廓线。
-
公开(公告)号：US06950249B2
公开(公告)日：2005-09-27
申请号：US10628945
申请日：2003-07-30
摘要： A Z-axis assembly for an optical inspection apparatus, comprises a base; first and second parallel rails secured to the base; a plurality of carriages supported by ball bearings for translatory movement parallel to the Z-axis on each of the first and second rails; the carriages having a line of travel through the ball bearings in contact with their respective rails; a support structure secured to the carriages; and a lens assembly secured to the support structure such to be movable parallel to the Z-axis, the lens assembly including an optical axis parallel to the Z-axis and the lines of travel, and optical axis and the lines of travel lie on a common plane.
-
-
-
搜索结果
4 条记录 (耗时 0.032 秒)