公开(公告)号：US20150062677A1

公开(公告)日：2015-03-05

申请号：US14471582

申请日：2014-08-28

申请人： Simon ARMBRUSTER ,  Helmut GRUTZECK ,  Frank SCHATZ ,  Joerg MUCHOW ,  Frederic Njikam NJIMONZIE ,  Johannes BAADER ,  Kerrin DOESSEL ,  Rainer STRAUB

发明人： Simon ARMBRUSTER ,  Helmut GRUTZECK ,  Frank SCHATZ ,  Joerg MUCHOW ,  Frederic Njikam NJIMONZIE ,  Johannes BAADER ,  Kerrin DOESSEL ,  Rainer STRAUB

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0858

摘要： A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.

摘要翻译： 描述微机械部件和微机械部件的制造方法。 该组件具有：一个框架; 板簧，其连接到所述框架并且具有背面和远离所述前侧的前侧和后侧; 镜片元件位于板簧的前侧，并连接到板簧的前侧，使得镜元件悬挂在框架上以便能够移位; 以及连接到所述板簧的后侧的至少一个压电条; 所述板簧通过向所述至少一个压电条施加电压而可弹性变形，以便使所述镜元件移位。

公开(公告)号：US20150061695A1

公开(公告)日：2015-03-05

申请号：US14471436

申请日：2014-08-28

申请人： Sebastian REISS ,  Simon ARMBRUSTER ,  Helmut GRUTZECK ,  Joerg MUCHOW ,  Frederic Njikam NJIMONZIE ,  Johannes BAADER ,  Rainer STRAUB ,  Wolfgang HEINZELMANN

发明人： Sebastian REISS ,  Simon ARMBRUSTER ,  Helmut GRUTZECK ,  Joerg MUCHOW ,  Frederic Njikam NJIMONZIE ,  Johannes BAADER ,  Rainer STRAUB ,  Wolfgang HEINZELMANN

IPC分类号： B81B7/00

CPC分类号： B81B7/0019 ,  B81B2201/042 ,  B81C99/005

摘要： A micromechanical component and a corresponding test method for a micromechanical component are described. The micromechanical component includes at least one first region, which is elastically connected to a second region via a spring device, a resistor element, which is situated in and/or on the spring device and is at least partially interruptible in the event of damage to the spring device, and a detection device, which is electrically connected to the resistor element, for detecting an interruption in the resistor element and for generating a corresponding detection signal.

摘要翻译： 描述了微机械部件和相应的微机械部件的测试方法。 微机械部件包括至少一个第一区域，其经由弹簧装置弹性地连接到第二区域，电阻器元件位于弹簧装置中和/或弹簧装置上，并且在损坏的情况下至少部分地可中断 弹簧装置和电连接到电阻元件的检测装置，用于检测电阻元件的中断并产生相应的检测信号。

公开(公告)号：US20140376071A1

公开(公告)日：2014-12-25

申请号：US14314192

申请日：2014-06-25

申请人： Simon ARMBRUSTER ,  Helmut GRUTZECK ,  Joerg MUCHOW ,  Frederic Njikam NJIMONZIE ,  Johannes BAADER ,  Stefan PINTER ,  Rainer STRAUB ,  Zoltan LESTYAN

发明人： Simon ARMBRUSTER ,  Helmut GRUTZECK ,  Joerg MUCHOW ,  Frederic Njikam NJIMONZIE ,  Johannes BAADER ,  Stefan PINTER ,  Rainer STRAUB ,  Zoltan LESTYAN

IPC分类号： G02B26/08 ,  B81C1/00

CPC分类号： G02B26/0833 ,  Y10T29/49863

摘要： A micromechanical component includes a mounting, and a mirror plate which is adjustable with respect to the mounting about at least one rotational axis and which has a mirror side and a rear side which faces away from the mirror side. The mirror plate is connected to the mounting at least via four springs. Each of the four springs extends partially along the rear side of the mirror plate and is connected to the mirror plate via one support post each, which in each case contacts an anchoring area situated on the rear side. Also described is a micromirror device, as well as a manufacturing method for a micromechanical component.

摘要翻译： 微机械部件包括安装件和相对于安装件围绕至少一个旋转轴线可调节的镜板，并且具有背面和远离镜侧的后侧。 镜板至少通过四个弹簧连接到安装座。 四个弹簧中的每一个部分地沿着镜板的后侧延伸，并且经由一个支撑柱连接到镜板，每个支撑柱在每种情况下都接触位于后侧的锚定区域。 还描述了微镜器件，以及微机械部件的制造方法。

公开(公告)号：US20140118005A1

公开(公告)日：2014-05-01

申请号：US14060879

申请日：2013-10-23

申请人： Wolfgang HEINZELMANN ,  Mohamad IYAD AL DIBS ,  Rainer STRAUB ,  Stefan PINTER ,  Frederic NJIKAM NJIMONZIE ,  Joerg MUCHOW ,  Helmut GRUTZECK ,  Simon ARMBRUSTER ,  Sebastian REISS

发明人： Wolfgang HEINZELMANN ,  Mohamad IYAD AL DIBS ,  Rainer STRAUB ,  Stefan PINTER ,  Frederic NJIKAM NJIMONZIE ,  Joerg MUCHOW ,  Helmut GRUTZECK ,  Simon ARMBRUSTER ,  Sebastian REISS

IPC分类号： G01R29/26 ,  G01R3/00

CPC分类号： B81B7/008 ,  B81B2203/0109 ,  B81B2203/056 ,  B81B2203/058 ,  G02B26/0858 ,  Y10T29/49002

摘要： A mechanical component has: a mounting; a movable part which, with the aid of at least one first spring and one second spring, is connected to the mounting in such a way that the movable part is movable about a rotational axis extending through a first anchoring area of the first spring on the mounting and a second anchoring area of the second spring on the mounting; a first sensor device with at least one first resistor which is situated on and/or in the first spring; and a second sensor device with at least one second resistor situated on and/or in the second spring. The first sensor device includes a first Wheatstone half bridge and the second sensor device includes a second Wheatstone half bridge. The first and second Wheatstone half bridges are connected to form a Wheatstone full bridge.

摘要翻译： 机械部件具有：安装件; 借助于至少一个第一弹簧和一个第二弹簧的可移动部件以这样的方式连接到所述安装件，使得所述可移动部件可以围绕延伸穿过所述第一弹簧的第一锚固区域的旋转轴线移动 并且所述第二弹簧的第二锚定区域在所述安装件上; 第一传感器装置，其具有位于第一弹簧和/或第一弹簧中的至少一个第一电阻器; 以及具有位于第二弹簧上和/或第二弹簧中的至少一个第二电阻器的第二传感器装置。 第一传感器装置包括第一惠斯通半桥，第二传感器装置包括第二惠斯通半桥。 第一个和第二个惠斯通半桥连接起来形成一个惠斯通电桥。

公开(公告)号：US20140355094A1

公开(公告)日：2014-12-04

申请号：US14247083

申请日：2014-04-07

申请人： Nicolas SCHORR ,  Friedjof HEUCK ,  Achim TRAUTMANN ,  Johannes BAADER ,  Franziska ROHLFING ,  Stefan PINTER ,  Rainer STRAUB

发明人： Nicolas SCHORR ,  Friedjof HEUCK ,  Achim TRAUTMANN ,  Johannes BAADER ,  Franziska ROHLFING ,  Stefan PINTER ,  Rainer STRAUB

IPC分类号： G02B26/08

CPC分类号： G02B26/0833 ,  B81B3/0083 ,  B81B2201/042 ,  B81B2203/0353 ,  G02B5/003

摘要： A micromechanical structure includes a substrate having an upper side and a lower side, the substrate having a first region and a second region adjacent thereto, the upper side being fashioned in the first region as a mirror region that reflects light. In the second region on the upper side of the substrate, a network-type structure and/or a web-type structure is fashioned, such that the second region is essentially non-light-reflective.

摘要翻译： 微机械结构包括具有上侧和下侧的基板，所述基板具有第一区域和与其相邻的第二区域，上侧在第一区域中形成为反射光的反射镜区域。 在基板的上侧的第二区域中，形成网状结构和/或网状结构，使得第二区域基本上是非光反射的。