公开(公告)号：US20240137628A1

公开(公告)日：2024-04-25

申请号：US18381117

申请日：2023-10-16

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Keigo Sato ,  Yuji Miyashita ,  Katsumi Yasuda

IPC: H04N23/45 ,  G06T7/00 ,  H01L21/67

CPC classification number: H04N23/45 ,  G06T7/0004 ,  H01L21/67265 ,  G06T2207/30148

Abstract: The load port includes a FOUP configured to accommodate a plurality of substrates in multiple stages, cameras configured to image each of the substrates accommodated in the FOUP and including a low-magnification camera with a wide horizontal angle of view and a high-magnification camera with a narrow horizontal angle of view, and a CPU configured to detect the accommodation state of each of the substrates based on the imaging data acquired from the low-magnification camera and the high-magnification camera, respectively.

公开(公告)号：US20240236450A9

公开(公告)日：2024-07-11

申请号：US18381117

申请日：2023-10-17

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Keigo Sato ,  Yuji Miyashita ,  Katsumi Yasuda

IPC: H04N23/45 ,  G06T7/00 ,  H01L21/67

CPC classification number: H04N23/45 ,  G06T7/0004 ,  H01L21/67265 ,  G06T2207/30148

Abstract: The load port includes a FOUP configured to accommodate a plurality of substrates in multiple stages, cameras configured to image each of the substrates accommodated in the FOUP and including a low-magnification camera with a wide horizontal angle of view and a high-magnification camera with a narrow horizontal angle of view, and a CPU configured to detect the accommodation state of each of the substrates based on the imaging data acquired from the low-magnification camera and the high-magnification camera, respectively.