公开(公告)号：US09805969B2

公开(公告)日：2017-10-31

申请号：US15153509

申请日：2016-05-12

Applicant: Soitec

Inventor： Sebastien Mougel ,  Didier Masselin

IPC: H01L21/762 ,  H01L21/324 ,  H01L21/66 ,  H01L27/12 ,  H01L21/67

CPC classification number: H01L21/7624 ,  H01L21/324 ,  H01L21/67248 ,  H01L21/762 ,  H01L21/76254 ,  H01L22/20 ,  H01L27/1229 ,  H01L27/1266

Abstract: A calibration method for determining temperature set point corrections to be applied to the nominal temperature set points of each of the N heating zones of a heat treatment unit having L substrate locations, includes the following steps: establishing a sensitivity model linking variations of a substrate characteristic at each of M representative locations of the L locations to temperature set point variations applied in each of the N heating zones, the variations respectively reflecting differences with respect to a target characteristic and with respect to the nominal set points; executing the process in the heat treatment unit and on the basis of nominal set points; measuring the substrate characteristic at least at a representative measurement location of each heating zone of the unit to supply M measurements; and determining temperature set point corrections from the sensitivity model, the measurements and the target substrate characteristic.

公开(公告)号：US20160336215A1

公开(公告)日：2016-11-17

申请号：US15153509

申请日：2016-05-12

Applicant: Soitec

Inventor： Sebastien Mougel ,  Didier Masselin

IPC: H01L21/762 ,  H01L21/324 ,  H01L21/66

CPC classification number: H01L21/7624 ,  H01L21/324 ,  H01L21/67248 ,  H01L21/762 ,  H01L21/76254 ,  H01L22/20 ,  H01L27/1229 ,  H01L27/1266

Abstract: A calibration method for determining temperature set point corrections to be applied to the nominal temperature set points of each of the N heating zones of a heat treatment unit having L substrate locations, includes the following steps: establishing a sensitivity model linking variations of a substrate characteristic at each of M representative locations of the L locations to temperature set point variations applied in each of the N heating zones, the variations respectively reflecting differences with respect to a target characteristic and with respect to the nominal set points; executing the process in the heat treatment unit and on the basis of nominal set points; measuring the substrate characteristic at least at a representative measurement location of each heating zone of the unit to supply M measurements; and determining temperature set point corrections from the sensitivity model, the measurements and the target substrate characteristic.

Abstract translation: 用于确定施加到具有L个衬底位置的热处理单元的每个N个加热区的标称温度设定点的温度设定点校正的校准方法包括以下步骤：建立连接衬底特性变化的灵敏度模型 在L个位置的M个代表位置中的每一个对应于在每个N个加热区域中的温度设定点变化，所述变化分别反映相对于目标特性和相对于标称设定点的差异; 在热处理单元中并基于标称设定点执行该过程; 至少在单元的每个加热区的代表性测量位置测量衬底特性以提供M测量; 并从灵敏度模型，测量和目标衬底特性中确定温度设定点校正。