公开(公告)号：US20040259280A1

公开(公告)日：2004-12-23

申请号：US10889157

申请日：2004-07-12

申请人： Sony Corporation

发明人： Junji Yamane ,  Kunihiko Hikichi

IPC分类号： H01L021/00

CPC分类号： H01L29/76891 ,  H01L27/14683 ,  H01L27/14812 ,  H01L27/14831 ,  H01L27/14843 ,  H01L29/66946 ,  H01L29/76866

摘要： A method of fabricating a solid-state image pickup device comprising forming mask patterns corresponding to patterns of first and third transfer electrodes, which are to be alternately arranged in each vertical transfer register formation region and which are to extend in parallel to each other between light receiving portions adjacent to each other in the vertical direction, on a first electrode material layer. The method also includes forming side walls on each of the mask patterns. The method further includes patterning the first electrode material layer via the mask patterns having the side walls, to form first and third transfer electrodes formed by the first layer. The method yet further includes forming second transfer electrodes by a second electrode material layer via an insulating film in such a manner that each of said second transfer electrodes is disposed between the first and third transfer electrodes of the first layer in said vertical transfer register formation region and between the light receiving portions. The method still further includes forming fourth transfer electrodes by a third electrode material layer via an insulating film in such a manner that each of the fourth transfer electrodes is between the third and first transfer electrodes of the first layer in the vertical transfer register formation region and between the light receiving portions.

摘要翻译： 一种制造固态图像拾取装置的方法，包括形成对应于第一和第三转印电极的图案的掩模图案，所述掩模图案将交替布置在每个垂直传送寄存器形成区域中并且在光之间彼此平行延伸 在第一电极材料层上在垂直方向上彼此相邻的接收部分。 该方法还包括在每个掩模图案上形成侧壁。 该方法还包括通过具有侧壁的掩模图案来图案化第一电极材料层，以形成由第一层形成的第一和第三转移电极。 该方法还包括通过绝缘膜通过第二电极材料层形成第二转移电极，使得所述第二转移电极中的每一个设置在所述垂直转移寄存器形成区域中的第一层的第一和第三转移电极之间 并且在光接收部分之间。 该方法还包括通过绝缘膜通过第三电极材料层形成第四转移电极，使得第四转移电极中的每一个在垂直转移寄存器形成区域中位于第一层的第三和第一转移电极之间，以及 在光接收部分之间。