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    MULTI-WORKPIECE PROCESSING CHAMBER AND WORKPIECE PROCESSING SYSTEM INCLUDING THE SAME
    1.
    发明申请
    MULTI-WORKPIECE PROCESSING CHAMBER AND WORKPIECE PROCESSING SYSTEM INCLUDING THE SAME 审中-公开
    多工件加工室和包括其中的工件加工系统

    公开(公告)号：US20100193132A1

    公开(公告)日：2010-08-05

    申请号：US12597924

    申请日：2009-04-02

    申请人： Soon Im Wi ,  Chang Woo Nam

    发明人： Soon Im Wi ,  Chang Woo Nam

    IPC分类号： C23F1/08 ,  C23C16/00

    CPC分类号： H01L21/6719

    摘要： A multi-workpiece processing chamber according to the present invention comprises a chamber housing which forms at least two internal processing spaces therein; at least one partition member which is provided in the chamber housing and partitions the chamber housing into at least two internal processing spaces; and the respective internal processing spaces being coupled with the partition member and having a symmetric shape to generate a processing reaction uniformly. The multi-workpiece processing chamber according to the present invention has internal processing spaces that have a symmetric shape by being coupled with a partition member. Thus, a processing reaction uniformly occurs across the internal processing areas and reproducibility and uniformity of a workpiece processing process may improve.

    摘要翻译： 根据本发明的多工件处理室包括在其中形成至少两个内部处理空间的腔室壳体; 至少一个分隔构件，设置在所述腔室中并将所述腔室壳体分隔成至少两个内部处理空间; 并且各个内部处理空间与分隔构件联接并且具有对称形状以均匀地产生加工反应。 根据本发明的多工件处理室具有通过与分隔构件联接而具有对称形状的内部处理空间。 因此，在内部处理区域内均匀地发生加工反应，可以提高工件加工工序的再现性和均匀性。

    Data writing density judging method for disc
    4.
    发明授权
    Data writing density judging method for disc 失效
    数据写入密度判断方法

    公开(公告)号：US6031802A

    公开(公告)日：2000-02-29

    申请号：US5511

    申请日：1998-01-12

    申请人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    发明人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    IPC分类号： G11B7/0037 ,  G11B7/085 ,  G11B19/12 ,  G11B3/90

    CPC分类号： G11B19/12 ,  G11B7/0037 ,  G11B7/08505

    摘要： An improved data writing density judging apparatus and method for a disc capable of judging a writing density of a disc by detecting an amount of cross talk or detecting a tracking error signal. Cross talk is detected when a disc track is scanned by a beam. A tracking error signal is detected when a pick-up member jumps a certain track while the pick-up member moves across a disc track. The improved apparatus and method computes a ratio between a minimum value and a maximum value of an envelope signal based on the detected amount of cross talk a writing density can be determined. The improved apparatus and method also converts a tracking error signal which is a high frequency analog signal into a digital signal that is used to compute a time required for a pick-up member to jump a certain track. Based on the computed time which is compared with a reference value, a writing density of a disk can also be determined.

    摘要翻译： 一种用于盘的改进的数据写入密度判断装置和方法，其能够通过检测串扰量或检测跟踪误差信号来判断盘的写入密度。 当光束被光束扫描时，检测到交谈。 当拾取构件在拾取构件移动穿过盘轨道时跳过某个轨道时，检测到跟踪误差信号。 改进的装置和方法基于检测到的串扰量可以确定包络信号的最小值和最大值之间的比率来确定书写密度。 改进的装置和方法还将作为高频模拟信号的跟踪误差信号转换为数字信号，该数字信号用于计算拾取构件跳跃某个轨道所需的时间。 基于与参考值进行比较的计算时间，也可以确定盘的写入密度。

    Data writing density judging apparatus and method
    5.
    发明授权
    Data writing density judging apparatus and method 失效
    数据写入密度判断装置及方法

    公开(公告)号：US5774438A

    公开(公告)日：1998-06-30

    申请号：US550652

    申请日：1995-10-31

    申请人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    发明人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    IPC分类号： G11B7/0037 ,  G11B7/085 ,  G11B19/12 ,  G11B3/90

    CPC分类号： G11B19/12 ,  G11B7/0037 ,  G11B7/08505

    摘要： An improved data writing density judging apparatus and method for a disc capable of judging a writing density of a disc by detecting an amount of cross talk or detecting a tracking error signal. Cross talk is detected when a disc track is scanned by a beam. A tracking error signal is detected when a pick-up member jumps a certain track while the pick-up member moves across a disc track. The improved apparatus and method computes a ratio between a minimum value and a maximum value of an envelope signal based on the detected amount of cross talk a writing density can be determined. The improved apparatus and method also converts a tracking error signal which is a high frequency analog signal into a digital signal that is used to compute a time required for a pick-up member to jump a certain track. Based on the computed time which is compared with a reference value, a writing density of a disk can also be determined.

    摘要翻译： 一种用于盘的改进的数据写入密度判断装置和方法，其能够通过检测串扰量或检测跟踪误差信号来判断盘的写入密度。 当光束被光束扫描时，检测到交谈。 当拾取构件在拾取构件移动穿过盘轨道时跳过某个轨道时，检测到跟踪误差信号。 改进的装置和方法基于检测到的串扰量可以确定包络信号的最小值和最大值之间的比率来确定书写密度。 改进的装置和方法还将作为高频模拟信号的跟踪误差信号转换为数字信号，该数字信号用于计算拾取构件跳跃某个轨道所需的时间。 基于与参考值进行比较的计算时间，也可以确定盘的写入密度。