Monitoring the deposition properties of an OLED
    2.
    发明授权
    Monitoring the deposition properties of an OLED 有权
    监测OLED的沉积性能

    公开(公告)号:US07214554B2

    公开(公告)日:2007-05-08

    申请号:US10803761

    申请日:2004-03-18

    IPC分类号: H01L21/00

    CPC分类号: H01L51/0008

    摘要: A method for making an OLED device includes providing a substrate having one or more test regions and one or more device regions, moving the substrate into a least one deposition chamber for deposition of at least one organic layer, and depositing the at least one organic layer through a shadowmask selectively onto the at least one device region and at least one test region on the substrate. The method also includes measuring a property of the at least one organic layer in the at least one test region, and adjusting the deposition process in accordance with the measured property.

    摘要翻译: 制造OLED器件的方法包括提供具有一个或多个测试区域和一个或多个器件区域的衬底,将衬底移动到至少一个沉积室中以沉积至少一个有机层,以及沉积至少一个有机层 通过阴影掩模选择性地到达至少一个器件区域和衬底上的至少一个测试区域。 该方法还包括测量至少一个测试区域中的至少一个有机层的性质,以及根据所测量的性质来调整沉积过程。