公开(公告)号：US5400269A

公开(公告)日：1995-03-21

申请号：US124176

申请日：1993-09-20

申请人： Stanley A. White ,  John C. Pinson

发明人： Stanley A. White ,  John C. Pinson

IPC分类号： G01C19/5607 ,  G01P15/18 ,  G01N27/10

CPC分类号： G01C19/5607 ,  G01P15/18

摘要： A sensor such as a quartz angular rate sensor is operated in a closed-loop mode including feedback of a control signal. The sensor produces a modulated carrier frequency signal. For stable operation of the feedback loop, the control signal is obtained from the modulated carrier frequency signal by complex demodulation of the modulated signal to produce an in-phase demodulated signal and a quadrature-phase demodulated signal, and the in-phase demodulated signal and the quadrature-phase demodulated signal are filtered by a complex equalizing filter to produce an equalized in-phase signal and an equalized quadrature-phase signal. The equalized in-phase signal represents information sensed by the sensor, and phase of a demodulation reference signal is adjusted to minimize appearance of the information in the equalized quadrature-phase signal. The equalized in-phase and quadrature-phase signals are complex modulated at the carrier frequency to produce the control signal. To compensate for variable delay or phase shift through the feedback loop, the phase of the control signal is adjusted by a phase adjustment signal. For equalization of an angular rate signal from a quartz angular rate sensor, the complex filtering includes compensation for peaking at the drive fork resonant frequency, compensation for secondary modes of vibration of the drive fork, and phase lead compensation for a relatively flat frequency response over the bandwidth of the angular rate signal.

摘要翻译： 诸如石英角速率传感器的传感器以闭环模式操作，包括控制信号的反馈。 传感器产生调制载波频率信号。 为了反馈环路的稳定运行，通过调制信号的复调制从调制载波频率信号获得控制信号，以产生同相解调信号和正交相位解调信号，同相解调信号和 正交相位解调信号被复均衡滤波器滤波，以产生均衡的同相信号和均衡的正交相位信号。 均衡的同相信号表示由传感器感测的信息，并且调整解调参考信号的相位以最小化均衡正交相位信号中的信息的外观。 均衡的同相和正交相位信号在载波频率下进行复调制以产生控制信号。 为了补偿通过反馈回路的可变延迟或相移，通过相位调整信号调节控制信号的相位。 对于来自石英角速率传感器的角速率信号的均衡，复数滤波包括对于驱动叉谐振频率处的峰值的补偿，对驱动叉的二次振动模式的补偿以及用于相对平坦的频率响应的相位引线补偿 角速率信号的带宽。

公开(公告)号：US5459432A

公开(公告)日：1995-10-17

申请号：US376467

申请日：1995-01-20

申请人： Stanley A. White ,  John C. Pinson

发明人： Stanley A. White ,  John C. Pinson

IPC分类号： G01C19/5607 ,  G01C21/16 ,  H03D1/00 ,  H03D1/24 ,  H04L27/22

CPC分类号： G01C19/5607 ,  G01C21/16 ,  H03D1/00

摘要： To demodulate an analog signal having information modulated by a carrier, the analog signal is chopped by a chopper, the chopped signal is digitized by a sigma-delta analog-to-digital converter to produce a series of digital samples at a sampling frequency, the digital samples are filtered in a digital decimating filter to produce data words, and the data words are modulated by an intermediate frequency signal to produce a detected information signal. The various frequency signals are generated by a phase-lock loop so that the intermediate frequency is the difference between the carrier frequency and the chopping frequency, and both the chopping frequency and the intermediate frequency are sub-multiples of the sampling frequency. Therefore aliases and artifacts caused by the chopper are either cancelled or fall on multiples of the output sampling frequency, and the intermediate frequency signal can be a square wave without generating artifacts that need be removed by filtering of the detected information signal. Preferably the chopper is placed in an analog portion of a feedback loop of the sigma-delta modulator, and an exclusive-OR gate is placed in the digital portion of the feedback loop, so that the gain of the demodulation process becomes independent of the gain of the chopper. The detection process is especially suited for detecting an angular-rate signal from a vibrating quartz angular rate sensor, because the detection process has very high accuracy, resolution, and linearity.

摘要翻译： 为了解调具有由载波调制的信息的模拟信号，模拟信号被斩波器斩波，斩波信号被Σ-Δ模数转换器数字化，以采样频率产生一系列数字样本， 数字样本在数字抽取滤波器中被滤波以产生数据字，并且数据字由中频信号调制以产生检测到的信息信号。 各种频率信号由相位锁定环路产生，使得中频是载波频率与斩波频率之差，斩波频率和中频均为采样频率的次倍数。 因此，由斩波器引起的别名和伪像被取消或落在输出采样频率的倍数上，并且中频信号可以是方波，而不产生需要通过滤波检测到的信息信号去除的伪像。 优选地，斩波器被放置在Σ-Δ调制器的反馈回路的模拟部分中，并且异或门被放置在反馈回路的数字部分中，使得解调过程的增益变得与增益无关 的砍刀。 检测过程特别适用于检测来自振动石英角速度传感器的角速率信号，因为检测过程具有非常高的精度，分辨率和线性度。

公开(公告)号：US5892153A

公开(公告)日：1999-04-06

申请号：US752570

申请日：1996-11-21

申请人： Marc S. Weinberg ,  John C. Pinson

发明人： Marc S. Weinberg ,  John C. Pinson

IPC分类号： G01C19/5719 ,  G01P9/04

CPC分类号： G01C19/5719

摘要： Guard bands which reduce or eliminate force and sensitivity associated with proof mass motion normal to the substrate as a result of voltage transients is disclosed. The guard bands are biased to reduce the coupling ratio to zero and thereby enable starting and improved performance. Various configurations of guard bands may be employed including distinct inner and outer guard bands, distinct inner guard bands only, extended sense electrodes below inner sensing combs with no outer guards, distinct outer guard bands with extended sense electrodes, and sense electrodes extended beneath both drive and sensing combs.

摘要翻译： 公开了减少或消除由于电压瞬变而与基板垂直的质量运动相关联的力和灵敏度的保护带。 保护带被偏置以将耦合比降低到零，从而实现起动和改进的性能。 可以采用保护带的各种配置，包括不同的内部和外部保护带，仅有不同的内部保护带，在没有外部保护的内部感测梳以下的扩展感测电极，具有扩展感测电极的不同外部保护带，以及在两个驱动器之下延伸的感测电极 和感应梳。

公开(公告)号：US06598475B2

公开(公告)日：2003-07-29

申请号：US09957425

申请日：2001-09-20

申请人： John C. Pinson

发明人： John C. Pinson

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A micromechanical inertial sensor is provided having a reduced pickoff Q, while maintaining a high motor Q. The micromechanical inertial sensor includes a pair of proof masses and aligned pickoff plates. Each pickoff plate is spaced from the respective proof mass by a gap that varies in response to out-of-plane movement of the proof mass. The micromechanical inertial sensor also includes at least one voltage source for providing charge to the pickoff plates. By measuring the movement of charge in each electrical circuit that includes a pickoff plate as the gap between the pickoff plate and the respective proof mass varies, a measurement of the rotation of the micromechanical inertial sensor about an input axis may be obtained. The micromechanical inertial sensor further includes resistive elements disposed in series between the voltage source and each pickoff plate to increase the pickoff resonance damping of the micromechanical inertial sensor.

摘要翻译： 提供具有减小的拾取Q的微机械惯性传感器，同时保持高电动机Q.微机械惯性传感器包括一对检验质量块和对准的检测板。 每个检测板与相应的检验质量块间隔开，该间隙响应于检验质量块的平面外运动而变化。 微机械惯性传感器还包括至少一个用于向拾取板提供电荷的电压源。 通过在检测板和相应的检验质量块之间的间隙变化时测量包括检测板的每个电路中的电荷的移动，可以获得关于输入轴的微机械惯性传感器的旋转的测量。 微机械惯性传感器还包括串联设置在电压源和每个检测板之间的电阻元件，以增加微机械惯性传感器的传感谐振阻尼。

公开(公告)号：US5476008A

公开(公告)日：1995-12-19

申请号：US279722

申请日：1994-07-25

申请人： John C. Pinson

发明人： John C. Pinson

IPC分类号： G01C19/5607 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： An improvement in rate-sensing tuning fork design includes a generally planar and H-shaped sensor frame of piezoelectric material. The frame includes a first pair of tines and a second pair of tines joined to an intermediate cross-piece. Connecting means is provided for connecting each of the second pair of tines to the other of said second pair at a location spaced from said intermediate cross-piece. The connecting means is preferably a connecting member formed of piezoelectric material, with the member being generally parallel to the intermediate cross-piece of the H-shaped frame and disposed between the second pair of tines. The connecting means prevents each of the tines of the second pair from vibrating directly toward or away from each other. A preferred method of use of the device is described.

摘要翻译： 速率感应音叉设计的改进包括压电材料的大体平面和H形传感器框架。 框架包括第一对尖齿和连接到中间横梁的第二对尖齿。 提供连接装置，用于将第二对尖齿中的每一个连接到与所述中间横梁隔开的位置处的所述第二对中的另一个。 连接装置优选为由压电材料形成的连接构件，该构件大致平行于H形框架的中间横截面并且设置在第二对尖齿之间。 连接装置防止第二对的每个尖齿彼此直接或相离地振动。 描述了该设备的优选使用方法。