Disentangling sample topography and physical properties in scanning near-field microwave microscopy
    1.
    发明授权
    Disentangling sample topography and physical properties in scanning near-field microwave microscopy 失效
    扫描近场微波显微镜扫描样品的形貌和物理性质

    公开(公告)号:US06376836B1

    公开(公告)日:2002-04-23

    申请号:US09473961

    申请日:1999-12-29

    IPC分类号: H01J314

    CPC分类号: G01Q60/18 G01Q30/06 G01Q40/00

    摘要: A method of disentangling sample properties in a scanned sample requires a calibration sample in which two sample properties are variable. The calibration sample is scanned, and two measured variables are recorded during the scan. The two sample properties are measured quantitatively by an independent means. Using the data from the calibration sample, conversion functions are mathematically determined, in order to convert the two measured variables into the two sample properties. A sample, for which the two properties are unknown, is scanned, and the two measured variables are recorded. Using the conversion functions, the data from the scan is converted into the two sample properties of interest for the unknown sample. This method can be used with the first sample property being topography, so that effects due to the topography of the sample are eliminated from the computation of the second property of the unknown sample. This method can also be used with the probe in contact with the sample, so that topography is not one of the two sample properties.

    摘要翻译: 在扫描样品中分离样品性质的方法需要两个样品性质可变的校准样品。 扫描校准样品,并在扫描过程中记录两个测量变量。 通过独立的方法定量测量两个样品性质。 使用来自校准样本的数据,数学确定转换函数,以便将两个测量变量转换为两个样本属性。 扫描两个属性未知的样本,并记录两个测量变量。 使用转换函数,将来自扫描的数据转换为未知样本感兴趣的两个样本属性。 该方法可以与第一样本属性一起用于形貌,从而从未知样本的第二属性的计算中消除由于样本的形貌引起的影响。 该方法也可以与探针接触样品一起使用,使得形貌不是两个样品性质之一。