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公开(公告)号：US10255385B2
公开(公告)日：2019-04-09
申请号：US13781474
申请日：2013-02-28
摘要： Model optimization approaches based on spectral sensitivity is described. For example, a method includes determining a first model of a structure. The first model is based on a first set of parameters. A set of spectral sensitivity variations data is determined for the structure. Spectral sensitivity is determined by derivatives of the spectra with respect to the first set of parameters. The first model of the structure is modified to provide a second model of the structure based on the set of spectral sensitivity variations data. The second model of the structure is based on a second set of parameters different from the first set of parameters. A simulated spectrum derived from the second model of the structure is then provided.
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公开(公告)号：US20130262044A1
公开(公告)日：2013-10-03
申请号：US13781474
申请日：2013-02-28
IPC分类号： G06F17/50
CPC分类号： G06F17/5009 , G01B2210/56 , G01N21/4788 , G03F7/705 , G03F7/70616 , G03F7/70625 , G06F17/5077 , G06T7/0006 , G06T2207/30148
摘要： Model optimization approaches based on spectral sensitivity is described. For example, a method includes determining a first model of a structure. The first model is based on a first set of parameters. A set of spectral sensitivity variations data is determined for the structure. Spectral sensitivity is determined by derivatives of the spectra with respect to the first set of parameters. The first model of the structure is modified to provide a second model of the structure based on the set of spectral sensitivity variations data. The second model of the structure is based on a second set of parameters different from the first set of parameters. A simulated spectrum derived from the second model of the structure is then provided.
摘要翻译： 描述了基于光谱灵敏度的模型优化方法。 例如，一种方法包括确定结构的第一模型。 第一个模型是基于第一组参数。 确定一组光谱灵敏度变化数据的结构。 光谱灵敏度取决于光谱相对于第一组参数的导数。 修改结构的第一个模型，以基于一组光谱灵敏度变化数据提供第二个结构模型。 该结构的第二模型基于与第一组参数不同的第二组参数。 然后提供从结构的第二模型导出的模拟光谱。
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3.发明申请DYNAMIC REMOVAL OF CORRELATION OF HIGHLY CORRELATED PARAMETERS FOR OPTICAL METROLOGY 审中-公开用于光学计量学的高相关参数的相关动态移除公开(公告)号：US20140358488A1
公开(公告)日：2014-12-04
申请号：US14293221
申请日：2014-06-02
IPC分类号： G01N21/25
CPC分类号： G03F7/70616 , G01N21/255 , G03F1/44 , G03F7/70483 , G03F7/70516 , G03F7/70625
摘要： Dynamic removal of correlation of highly-correlated parameters for optical metrology is described. An embodiment of a method includes determining a model of a structure, the model including a set of parameters; performing optical metrology measurement of the structure, including collecting spectra data on a hardware element; during the measurement of the structure, dynamically removing correlation of two or more parameters of the set of parameters, an iteration of the dynamic removal of correlation including: generating a Jacobian matrix of the set of parameters, applying a singular value decomposition of the Jacobian matrix, selecting a subset of the set of parameters, and computing a direction of the parameter search based on the subset of parameters. If the model does not converge, performing one or more additional iterations of the dynamic removal of correlation until the model converges; and if the model does converge, reporting the results of the measurement.
摘要翻译： 描述了用于光学测量的高度相关参数的相关性的动态去除。 方法的实施例包括确定结构的模型，所述模型包括一组参数; 执行结构的光学测量测量，包括在硬件元件上收集光谱数据; 在结构测量期间，动态地去除该组参数中的两个或多个参数的相关性，相关动态去除的迭代包括：生成该组参数的雅可比矩阵，应用雅可比矩阵的奇异值分解 ，选择参数集合的子集，以及基于参数子集计算参数搜索的方向。 如果模型不收敛，则执行动态去除相关性的一个或多个附加迭代，直到模型收敛; 如果模型收敛，报告测量结果。
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