公开(公告)号：US10600640B2

公开(公告)日：2020-03-24

申请号：US15624603

申请日：2017-06-15

Applicant: Stratio, Inc.

Inventor： Woo-Shik Jung ,  Yeul Na ,  Youngsik Kim ,  Jae Hyung Lee ,  Jin Hyung Lee

IPC: H01L21/02 ,  H01L21/302 ,  H01L21/324 ,  H01L21/265 ,  H01L21/311 ,  H01L21/306

Abstract: Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of germanium. In some embodiments, the surface roughness is further reduced by controlling a rate of the thermal oxidation. In some embodiments, the surface roughness is reduced by thermal annealing.

公开(公告)号：US20170287706A1

公开(公告)日：2017-10-05

申请号：US15624603

申请日：2017-06-15

Applicant: Stratio, Inc.

Inventor： Woo-Shik Jung ,  Yeul Na ,  Youngsik Kim ,  Jae Hyung Lee ,  Jin Hyung Lee

IPC: H01L21/02 ,  H01L21/265 ,  H01L21/311

Abstract: Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of germanium. In some embodiments, the surface roughness is further reduced by controlling a rate of the thermal oxidation. In some embodiments, the surface roughness is reduced by thermal annealing.