公开(公告)号：US5467642A

公开(公告)日：1995-11-21

申请号：US145600

申请日：1993-11-04

申请人： Sumio Hosaka ,  Atsushi Kikugawa ,  Yukio Honda ,  Hajime Koyanagi ,  Kiyosi Nagasawa

发明人： Sumio Hosaka ,  Atsushi Kikugawa ,  Yukio Honda ,  Hajime Koyanagi ,  Kiyosi Nagasawa

IPC分类号： G01B5/28 ,  G01B7/00 ,  G01B7/34 ,  G01B21/30 ,  G01N27/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/06 ,  G01Q70/04

CPC分类号： G01Q70/04 ,  B82Y35/00 ,  G01Q30/06 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/86 ,  Y10S977/868 ,  Y10S977/87 ,  Y10S977/872 ,  Y10S977/873

摘要： A scanning probe microscope in which the deflection of a cantilever caused by the proximity between a stylus and a sample is detected, the relative distance between the sample and a probe at which the level of the deflection detection signal coincides with a reference level is subjected to servo control thereby to control the force exerted on the stylus to a constant level, and the relative positions of the sample and the probe are scanned to produce a three-dimensional image of the surface of the sample. In order to eliminate the error of servo control attributable to the deformation of the cantilever, the deflection detection signal is held with the cantilever set in free standing state, and the signal thus held is used to correct the level of the cantilever deflection detection signal. The servo control is effected by the detection signal thus corrected.

摘要翻译： 检测由触针和样品之间的接近度引起的悬臂偏转的扫描探针显微镜，将样品与偏转检测信号的电平与参考水平重合的探针之间的相对距离进行 伺服控制，从而将施加在触针上的力控制到一定水平，扫描样品和探针的相对位置以产生样品表面的三维图像。 为了消除由于悬臂变形引起的伺服控制的误差，偏转检测信号由悬臂设定为自立状态而被保持的信号用于校正悬臂偏转检测信号的电平。 伺服控制由如此校正的检测信号来实现。