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公开(公告)号：US09707493B2
公开(公告)日：2017-07-18
申请号：US14556699
申请日：2014-12-01
发明人： Takahiro Yatsu
摘要： In a cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, a cold panel is located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump. A cold panel chamber includes an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump. The exit is provided so as to be eccentric with respect to the entrance.
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公开(公告)号：US20220099076A1
公开(公告)日：2022-03-31
申请号：US17490642
申请日：2021-09-30
发明人： Takahiro Yatsu
IPC分类号： F04B37/08
摘要： There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.
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公开(公告)号：US20210180579A1
公开(公告)日：2021-06-17
申请号：US17188408
申请日：2021-03-01
发明人： Takahiro Yatsu
摘要： A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.
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公开(公告)号：US20170045043A1
公开(公告)日：2017-02-16
申请号：US15232636
申请日：2016-08-09
发明人： Takahiro Yatsu
摘要： A cryopump includes a gas flow regulation member which deflects a flow of gas, which flows in from a shield main opening, from a cryocooler structural portion. The gas flow regulation member is disposed to be adjacent to the cryocooler structural portion such that the gas flow regulation member is in contact with neither a second cooling stage nor a second cryopanel unit of a cryocooler. The gas flow regulation member may be thermally connected to a first cooling stage of the cryocooler.
摘要翻译： 低温泵包括气流调节构件，其将从屏蔽主开口流入的气体流从低温冷却器结构部分偏转。 气体流量调节部件设置成与低温冷却器结构部分相邻，使得气体流量调节部件既不与低温冷却器的第二冷却段也不与第二冷冻板单元接触。 气体流量调节构件可以热连接到低温冷却器的第一冷却级。
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公开(公告)号：US20150151216A1
公开(公告)日：2015-06-04
申请号：US14556699
申请日：2014-12-01
发明人： Takahiro Yatsu
IPC分类号： B01D8/00
摘要： In a cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, a cold panel is located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump. A cold panel chamber includes an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump. The exit is provided so as to be eccentric with respect to the entrance.
摘要翻译： 在真空室和用于真空室的真空泵之间设置的冷阱中，冷板位于从真空室的排气口到真空泵的进气口的排气通道中。 冷板室包括将排气通道连接到真空室的排气口的入口和将排气通道连接到真空泵的进气口的出口。 出口设置成相对于入口偏心。
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公开(公告)号：US11732703B2
公开(公告)日：2023-08-22
申请号：US17490642
申请日：2021-09-30
发明人： Takahiro Yatsu
IPC分类号： F04B37/08
CPC分类号： F04B37/085 , Y10S417/901
摘要： There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.
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公开(公告)号：US20220397108A1
公开(公告)日：2022-12-15
申请号：US17730496
申请日：2022-04-27
发明人： Takahiro Yatsu , Toshiyuki Kimura
摘要： A cryopump includes a cryopanel disposed in a cryopump housing and including a non-combustible adsorbent, a heater heating the non-combustible adsorbent and the cryopanel, a purge valve connecting the cryopump housing to a purge gas source, a rough valve connecting the cryopump housing to a rough pump, a sensor that generates a measurement signal indicating a temperature of the non-combustible adsorbent or an internal pressure of the cryopump housing, and a controller that controls at least one of the heater, the purge valve, and the rough valve based on the measurement signal so as to execute either a sublimation regeneration sequence for sublimating water from the non-combustible adsorbent by exposing the non-combustible adsorbent to a vacuum atmosphere or a dehydration sequence for dehydrating the non-combustible adsorbent by exposing the non-combustible adsorbent to a dry atmosphere at room temperature or a temperature higher than the room temperature.
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公开(公告)号：US10100821B2
公开(公告)日：2018-10-16
申请号：US14971746
申请日：2015-12-16
发明人： Takahiro Yatsu
摘要： A cold trap includes a cold panel, a cryocooler which cools the cold panel, a stage temperature control unit which determines a control input to the cryocooler to cool a cooling stage of the cryocooler to a target temperature, an input heat estimation unit which estimates an increase of input heat into the cold panel based on the control input to the cryocooler determined by the stage temperature control unit, and a target temperature adjustment unit which adjusts a target temperature based on the increase of the input heat estimated by the input heat estimation unit.
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公开(公告)号：US20150151215A1
公开(公告)日：2015-06-04
申请号：US14556664
申请日：2014-12-01
发明人： Takahiro Yatsu
IPC分类号： B01D8/00
CPC分类号： B01D8/00
摘要： A cold trap is provided between a vacuum chamber and a vacuum pump. The cold trap includes a cold panel and a cold panel chamber that surrounds the cold panel in an exhaust passage. The cold panel includes an expansion panel outside the cold panel chamber. The expansion panel is located in the vacuum chamber.
摘要翻译： 在真空室和真空泵之间设置冷阱。 冷阱包括在排气通道中围绕冷板的冷板和冷板室。 冷板包括冷板室外的扩展板。 膨胀面板位于真空室中。
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公开(公告)号：US20200378378A1
公开(公告)日：2020-12-03
申请号：US16998582
申请日：2020-08-20
发明人： Takahiro Yatsu
摘要： A cryopump includes a cryopump housing and a water absorbing layer mounted on an outer side of the cryopump housing.
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