利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

32 条记录 (耗时 0.025 秒)

    Silicon direct bonding method
    1.
    发明申请
    Silicon direct bonding method 有权
    硅直接键合法

    公开(公告)号：US20070155056A1

    公开(公告)日：2007-07-05

    申请号：US11505420

    申请日：2006-08-17

    申请人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

    发明人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

    IPC分类号： H01L21/00

    CPC分类号： H01L21/187 ,  H01L21/2007

    摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.

    摘要翻译： 抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。 沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。 在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

    Silicon direct bonding method
    2.
    发明授权
    Silicon direct bonding method 有权
    硅直接键合法

    公开(公告)号：US07442622B2

    公开(公告)日：2008-10-28

    申请号：US11505420

    申请日：2006-08-17

    申请人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

    发明人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

    IPC分类号： H01L21/30

    CPC分类号： H01L21/187 ,  H01L21/2007

    摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.

    摘要翻译： 抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。 沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。 在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

    Piezoelectric actuator inkjet head and method of forming the same
    4.
    发明申请
    Piezoelectric actuator inkjet head and method of forming the same 失效
    压电致动器喷墨头及其形成方法

    公开(公告)号：US20070195134A1

    公开(公告)日：2007-08-23

    申请号：US11581333

    申请日：2006-10-17

    申请人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

    发明人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

    摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

    摘要翻译： 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

    Method of forming piezoelectric actuator of inkjet head
    6.
    发明授权
    Method of forming piezoelectric actuator of inkjet head 失效
    形成喷墨头压电致动器的方法

    公开(公告)号：US07603756B2

    公开(公告)日：2009-10-20

    申请号：US11583798

    申请日：2006-10-20

    申请人： Seung-mo Lim ,  Kyo-yeol Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Jae-chang Lee

    发明人： Seung-mo Lim ,  Kyo-yeol Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Jae-chang Lee

    IPC分类号： H04R17/00 ,  H01L41/24

    CPC分类号： B41J2/161 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49401

    摘要： A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

    摘要翻译： 提供一种形成在振动板上的喷墨头的压电致动器的方法，以提供用于将油墨喷射到每个压力室的驱动力。 该方法包括在振动板上形成下电极，在下电极上形成压电层，位于每个压力室之上，形成覆盖下电极和压电层的保护层，暴露压电层的上表面 通过减小保护层和压电层的厚度，在压电层的上表面上形成上电极，除去保护层。 根据本发明，由于具有平坦的上表面的压电层形成均匀的图形，所以形成在其上的上电极的面积和厚度被均匀地控制。

    Piezoelectric ink-jet printhead
    7.
    发明授权
    Piezoelectric ink-jet printhead 有权
    压电式喷墨打印头

    公开(公告)号：US07121650B2

    公开(公告)日：2006-10-17

    申请号：US10321604

    申请日：2002-12-18

    申请人： Jae-woo Chung ,  Jae-chang Lee ,  Seung-mo Lim

    发明人： Jae-woo Chung ,  Jae-chang Lee ,  Seung-mo Lim

    IPC分类号： B41J2/045

    CPC分类号： B41J2/161 ,  B41J2/1618 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14306 ,  B41J2002/14475

    摘要： A piezoelectric ink-jet printhead and a method for manufacturing the same, wherein the piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates on one another and adhering them to one another. The three substrates include an upper substrate, through which an ink supply hole is formed and a pressure chamber is formed on a bottom surface thereof; an intermediate substrate, in which an ink reservoir and a damper are formed; and a lower substrate, in which a nozzle is formed. A piezoelectric actuator is monolithically formed on the upper substrate. A restrictor, which connects the ink reservoir to the pressure chamber in flow communication, may be formed on the upper substrate or intermediate substrate.

    摘要翻译： 一种压电喷墨打印头及其制造方法，其中压电喷墨打印头通过将三个单晶硅基板彼此堆叠并将它们彼此粘合而形成。 三个基板包括上基板，在其上形成有供墨孔，在其底面上形成有压力室; 中间基板，其中形成有墨水储存器和阻尼器; 以及形成有喷嘴的下基板。 压电致动器整体地形成在上基板上。 可以在上基板或中间基板上形成将油墨储存器与流动连通的压力室连接的限流器。

    Method of forming a piezoelectric actuator of an inkjet head
    8.
    发明授权
    Method of forming a piezoelectric actuator of an inkjet head 有权
    形成喷墨头的压电致动器的方法

    公开(公告)号：US08806727B2

    公开(公告)日：2014-08-19

    申请号：US12712442

    申请日：2010-02-25

    申请人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

    发明人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

    IPC分类号： H04R17/00

    CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

    摘要： A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.

    摘要翻译： 在振动板上形成压电致动器以向多个压力室中的每一个提供驱动力的方法包括在振动板上形成下电极，在下电极上形成压电层，位于对应于 在所述下电极上形成支撑垫，所述支撑垫接触所述压电层的一端并且远离所述压电层的一端延伸，形成从所述压电层的顶表面延伸到顶部的上电极 并且将上电极连接到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。

    Piezoelectric actuator inkjet head and method of forming the same
    9.
    发明授权
    Piezoelectric actuator inkjet head and method of forming the same 失效
    压电致动器喷墨头及其形成方法

    公开(公告)号：US07682001B2

    公开(公告)日：2010-03-23

    申请号：US11581333

    申请日：2006-10-17

    申请人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

    发明人： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

    摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

    摘要翻译： 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

    Piezoelectric ink-jet printhead and method of manufacturing a nozzle plate of the same
    10.
    发明授权
    Piezoelectric ink-jet printhead and method of manufacturing a nozzle plate of the same 失效
    压电式喷墨打印头及其喷嘴板的制造方法

    公开(公告)号：US07445314B2

    公开(公告)日：2008-11-04

    申请号：US11064834

    申请日：2005-02-25

    申请人： Jae-chang Lee ,  Jung-min Oh ,  Jae-woo Chung ,  Jong-beom Kim ,  Seung-mo Lim

    发明人： Jae-chang Lee ,  Jung-min Oh ,  Jae-woo Chung ,  Jong-beom Kim ,  Seung-mo Lim

    IPC分类号： B41J2/135 ,  B41J29/38 ,  B41J2/045

    CPC分类号： B41J2/161 ,  B41J2/14137 ,  B41J2/14233 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646

    摘要： In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.

    摘要翻译： 在压电喷墨打印头和喷嘴板的制造方法中，压电喷墨打印头包括流路板，该流路板具有墨流路，该墨流路包括填充有待喷射的墨的压力室，形成在 流路板的上表面，并且用于向压力室供给用于喷墨的驱动力;以及喷嘴板，其结合到流路板的下表面，该喷嘴板包括用于从通过喷嘴板钻出的压力室喷射油墨的喷嘴 。 打印头还可以包括形成在喷嘴板的下表面上的加热器，用于加热油墨流路中的油墨和/或形成在喷嘴板的下表面上或在流路板的上表面上形成的温度检测器。