公开(公告)号：US08813363B2

公开(公告)日：2014-08-26

申请号：US12722843

申请日：2010-03-12

申请人： Jae-chang Lee ,  Jae-woo Chung ,  Kyo-yool Lee ,  Chang-seung Lee ,  Sung-gyu Kang

发明人： Jae-chang Lee ,  Jae-woo Chung ,  Kyo-yool Lee ,  Chang-seung Lee ,  Sung-gyu Kang

IPC分类号： B21D53/76 ,  B23P17/00 ,  H01L41/22 ,  H04R17/00 ,  H01L41/00

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a piezoelectric inkjet printhead includes processing a lower silicon-on-insulator substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer, processing the lower silicon-on-insulator substrate by etching the second silicon layer to form a manifold, a plurality of pressure chambers arranged along at least one side of the manifold and connected with the manifold, and a plurality of dampers connected with the pressure chambers, and by etching the first silicon layer and the intervening oxide layer to form a plurality of vertical nozzles through the first silicon layer and the intervening oxide layer to corresponding ones of the plurality of dampers, stacking and bonding an upper substrate on the lower substrate, reducing the upper substrate to a predetermined thickness, and forming a piezoelectric actuator on the upper substrate.

摘要翻译： 一种制造压电喷墨打印头的方法包括：通过第一硅层，中间氧化物层和第二硅层处理具有顺序层叠结构的下硅绝缘体上基板，通过以下方式处理下硅绝缘体上基板： 蚀刻所述第二硅层以形成歧管，沿所述歧管的至少一侧布置并与所述歧管连接的多个压力室以及与所述压力室连接的多个阻尼器，并且通过蚀刻所述第一硅层和所述第二硅层 形成多个垂直喷嘴，通过第一硅层和中间氧化物层到多个阻尼器中的相应的阻尼器，堆叠并结合下基板上的上基板，将上基板还原成预定厚度;以及 在上基板上形成压电致动器。

公开(公告)号：US08556382B2

公开(公告)日：2013-10-15

申请号：US12461501

申请日：2009-08-13

申请人： Sung-gyu Kang

发明人： Sung-gyu Kang

IPC分类号： B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631

摘要： Provided are a nozzle plate and a method of fabricating the nozzle plate. In accordance with an example embodiment of the present invention, a nozzle plate may include a body and at least one nozzle protruding from the body, wherein the at least one nozzle includes a wall having a thickness that increases the farther the wall gets away from an exit of the at least one nozzle.

摘要翻译： 提供了喷嘴板和制造喷嘴板的方法。 根据本发明的示例性实施例，喷嘴板可以包括主体和从主体突出的至少一个喷嘴，其中，所述至少一个喷嘴包括具有增加壁的距离越远的壁的壁 至少一个喷嘴的出口。

公开(公告)号：US20130063529A1

公开(公告)日：2013-03-14

申请号：US13604269

申请日：2012-09-05

申请人： Young-ki HONG ,  Sung-gyu KANG ,  Jae-woo CHUNG ,  Seung-ho LEE ,  Joong-hyuk KIM ,  Yong-wan JIN

发明人： Young-ki HONG ,  Sung-gyu KANG ,  Jae-woo CHUNG ,  Seung-ho LEE ,  Joong-hyuk KIM ,  Yong-wan JIN

IPC分类号： B41J2/045 ,  B44C1/22

CPC分类号： B41J2/1433 ,  B41J2/06 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/161 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  Y10T29/49401

摘要： A printing apparatus includes: a flow channel plate including, a pressure chamber, a nozzle including an outlet through which ink contained in the pressure chamber is ejected, and a trench disposed around the nozzle, and the outlet extending into the trench; a piezoelectric actuator configured to provide a change in pressure to eject the ink contained in the pressure chamber; and an electrostatic actuator configured to provide an electrostatic driving force to the ink contained in the nozzle.

公开(公告)号：US07926177B2

公开(公告)日：2011-04-19

申请号：US11425204

申请日：2006-06-20

申请人： Sung-gyu Kang ,  Kae-dong Back ,  Seung-mo Lim ,  Jae-woo Chung

发明人： Sung-gyu Kang ,  Kae-dong Back ,  Seung-mo Lim ,  Jae-woo Chung

IPC分类号： B23P17/00 ,  B21D53/76 ,  B41J2/15 ,  B41J2/145

CPC分类号： B41J2/1433 ,  B41J2/1606 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1643 ,  Y10T29/49401

摘要： A method of forming a hydrophobic coating layer on a surface of a nozzle plate of an inkjet printhead includes forming a plurality of nozzles in the nozzle plate, each of the nozzles having an exit, stacking a film on the surface of the nozzle plate to cover the exit of each of the nozzles, forming a predetermined metal layer on an inner wall of each of the nozzles and an inner surface of the film covering the exit of each of the nozzles using a plating method, removing the film from the surface of the nozzle plate, forming a hydrophobic coating layer on the surface of the nozzle plate to cover the metal layer exposed through the exit of each of the nozzles, and removing the metal layer formed on the inner wall of each of the nozzles and the hydrophobic coating layer formed on the surface of the metal layer.

摘要翻译： 在喷墨打印头的喷嘴板的表面上形成疏水涂层的方法包括在喷嘴板中形成多个喷嘴，每个喷嘴具有出口，在喷嘴板的表面上堆叠膜以覆盖 每个喷嘴的出口，在每个喷嘴的内壁上形成预定的金属层，并且使用电镀方法将膜的内表面覆盖每个喷嘴的出口，从该表面移除该膜 喷嘴板，在喷嘴板的表面上形成疏水涂层，以覆盖通过每个喷嘴的出口暴露的金属层，并且去除形成在每个喷嘴的内壁上的金属层和疏水涂层 形成在金属层的表面上。

公开(公告)号：US07891064B2

公开(公告)日：2011-02-22

申请号：US11768293

申请日：2007-06-26

申请人： Sung-gyu Kang ,  Young-ki Hong ,  Jae-woo Chung ,  Se-young Oh

发明人： Sung-gyu Kang ,  Young-ki Hong ,  Jae-woo Chung ,  Se-young Oh

IPC分类号： H01L41/22 ,  B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/055 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/14403 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/11 ,  Y10T29/42

摘要： A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate. Due to the above configuration, the membrane having flexibility mitigates a rapid pressure change in the manifold caused by backflow of ink, and thus, cross-talk between adjacent pressure chambers during ink ejection can be effectively prevented.

摘要翻译： 压电喷墨头和压电喷墨头的制造方法。 压电喷墨头包括彼此结合的三个单晶硅衬底。 上基板包括墨入口，多个压力室和多个压电致动器，中间基板包括歧管，多个限流器和多个第一阻尼器，下基板包括多个喷嘴。 中间基板还包括形成在歧管下方的膜，以减轻歧管中的快速压力变化，并且如果由不同于用于形成中间基板的材料形成的材料形成。 在中间基板或下基板中形成位于膜下方的空腔和将空腔连接到外部的至少一个通气通道。 由于上述结构，具有柔性的膜减轻了由于油墨的回流引起的歧管中的快速压力变化，因此可以有效地防止在喷墨期间相邻压力室之间的串扰。

公开(公告)号：US07883180B2

公开(公告)日：2011-02-08

申请号：US11766283

申请日：2007-06-21

申请人： Tae-woon Cha ,  Seung-mo Lim ,  Sung-gyu Kang ,  Jae-woo Chung

发明人： Tae-woon Cha ,  Seung-mo Lim ,  Sung-gyu Kang ,  Jae-woo Chung

IPC分类号： B41J2/14

CPC分类号： B41J2/1433 ,  B41J2/1606 ,  B41J2/162 ,  B41J2/1642

摘要： A nozzle plate of an inkjet printhead, and a method of manufacturing the nozzle plate. The nozzle plate includes a substrate through which nozzles are formed; an ink-philic coating layer formed on an outer surface of the substrate and inner walls of the nozzles; and an ink-phobic coating layer selectively formed on the ink-philic coating layer disposed around the nozzles.

摘要翻译： 喷墨打印头的喷嘴板，以及喷嘴板的制造方法。 喷嘴板包括形成喷嘴的基板; 形成在基板的外表面和喷嘴的内壁上的亲油涂层; 以及在设置在喷嘴周围的亲油性涂层上选择性地形成的墨滴涂层。

公开(公告)号：US20100128088A1

公开(公告)日：2010-05-27

申请号：US12461501

申请日：2009-08-13

申请人： Sung-gyu Kang

发明人： Sung-gyu Kang

IPC分类号： B41J2/14 ,  B44C1/22

CPC分类号： B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631

摘要： Provided are a nozzle plate and a method of fabricating the nozzle plate. In accordance with an example embodiment of the present invention, a nozzle plate may include a body and at least one nozzle protruding from the body, wherein the at least one nozzle includes a wall having a thickness that increases the farther the wall gets away from an exit of the at least one nozzle.

摘要翻译： 提供了喷嘴板和制造喷嘴板的方法。 根据本发明的示例性实施例，喷嘴板可以包括主体和从主体突出的至少一个喷嘴，其中，所述至少一个喷嘴包括具有增加壁的距离越远的壁的壁 至少一个喷嘴的出口。

公开(公告)号：US20070155056A1

公开(公告)日：2007-07-05

申请号：US11505420

申请日：2006-08-17

申请人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

发明人： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

IPC分类号： H01L21/00

CPC分类号： H01L21/187 ,  H01L21/2007

摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.

摘要翻译： 抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。 沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。 在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

公开(公告)号：US20050190241A1

公开(公告)日：2005-09-01

申请号：US11064826

申请日：2005-02-25

申请人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim ,  Sung-gyu Kang

发明人： Hwa-sun Lee ,  Jae-woo Chung ,  Seung-mo Lim ,  Sung-gyu Kang

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14491 ,  Y10T29/42

摘要： In a piezoelectric actuator for an ink-jet printhead, and a method of forming the same, formed on a flow path plate having a pressurizing chamber, the piezoelectric actuator for applying a driving force for ink ejection to the pressurizing chamber, the piezoelectric actuator includes a lower electrode formed on the flow path plate, a bonding pad formed on the flow path plate to be insulated from the lower electrode, wherein a driving circuit for voltage application is bonded to an upper surface of the bonding pad, a piezoelectric layer formed on the lower electrode at a position corresponding to the pressurizing chamber, wherein an end of the piezoelectric layer extends onto the bonding pad, and an upper electrode formed on the piezoelectric layer, wherein an end of the upper electrode extends beyond the end of the piezoelectric layer and contacts the upper surface of the bonding pad.

摘要翻译： 在具有加压室的流路板上形成的用于喷墨打印头的压电致动器及其形成方法中，压电致动器用于向加压室施加用于喷墨的驱动力，压电致动器包括 形成在所述流路板上的下电极，形成在所述流路板上以与所述下电极绝缘的接合焊盘，其中施加电压的驱动电路接合到所述接合焊盘的上表面，形成在所述接合焊盘的上表面上的压电层 所述下部电极在与所述加压室对应的位置处，其中所述压电层的端部延伸到所述接合焊盘上，以及形成在所述压电层上的上部电极，其中所述上部电极的端部延伸超出所述压电层的端部 并接触焊盘的上表面。

公开(公告)号：US08485641B2

公开(公告)日：2013-07-16

申请号：US12801616

申请日：2010-06-17

申请人： Sung-gyu Kang ,  Jae-woo Chung ,  Young-Ki Hong

发明人： Sung-gyu Kang ,  Jae-woo Chung ,  Young-Ki Hong

IPC分类号： B41J2/14 ,  C23F1/00

CPC分类号： B41J2/1642 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631

摘要： Provided is a nozzle plate and methods of manufacturing the nozzle plate. The nozzle plate may include a substrate having a nozzle. The nozzle plate may also include a permittivity reducing area in an upper portion of the substrate around the nozzle, wherein the permittivity reducing area includes a plurality of porosities and a plurality of walls between the plurality of porosities. Additionally, the nozzle plate may include a protection layer on the substrate, wherein the protection layer covers the plurality of porosities and the plurality of walls.

摘要翻译： 提供一种喷嘴板和制造喷嘴板的方法。 喷嘴板可以包括具有喷嘴的基板。 喷嘴板还可以包括在喷嘴周围的基板的上部中的介电常数降低区域，其中介电常数降低区域包括多个孔隙率和多个孔隙之间的多个壁。 此外，喷嘴板可以在基板上包括保护层，其中保护层覆盖多个孔隙和多个壁。