公开(公告)号：US20120019794A1

公开(公告)日：2012-01-26

申请号：US13156924

申请日：2011-06-09

申请人： Sven Antoin Johan HOL ,  Johannes Petrus Martinus Bernardus VERMEULEN ,  Wilhelmus Henricus Theodorus Maria AANGENENT ,  George Wilhelmus Johannes CLIJSEN ,  Johannes Antonius Gerardus AKKERMANS ,  Jacob Kornelis TER VEER ,  Jeroen DE BOEIJ

发明人： Sven Antoin Johan HOL ,  Johannes Petrus Martinus Bernardus VERMEULEN ,  Wilhelmus Henricus Theodorus Maria AANGENENT ,  George Wilhelmus Johannes CLIJSEN ,  Johannes Antonius Gerardus AKKERMANS ,  Jacob Kornelis TER VEER ,  Jeroen DE BOEIJ

IPC分类号： G03B27/54 ,  H01H47/00

CPC分类号： G03F7/70758 ,  G03F7/70775

摘要： A variable reluctance device includes first and second magnetic members, a coil, a measurement coil, and a control unit. The first and second magnetic members are displaceable relative to each other to provide a magnetic circuit having a variable reluctance. The coil for, in use, receiving a current for generating a magnetic flux through the magnetic circuit. The measurement coil for generating a measurement signal representative of the magnetic flux through the magnetic circuit, whereby the measurement coil is arranged to substantially enclose the magnetic flux through the magnetic circuit. The control unit arranged to receive the flux signal at an input terminal and, in response, provide a control signal based on the measurement signal at an output terminal for controlling an amplitude of the current or a force of a further device. The device can e.g., be applied in a stage apparatus or a lithographic apparatus.

摘要翻译： 可变磁阻装置包括第一和第二磁性部件，线圈，测量线圈和控制单元。 第一和第二磁性构件可相对于彼此移动以提供具有可变磁阻的磁路。 用于在使用中的线圈接收用于通过磁路产生磁通量的电流。 用于产生表示通过磁路的磁通的测量信号的测量线圈，由此测量线圈被布置成基本上包围通过磁路的磁通量。 所述控制单元被布置成在输入端子处接收通量信号，并且作为响应，基于输出端子处的测量信号提供控制信号，用于控制另一设备的电流或力的幅度。 该装置可以例如应用于平台装置或光刻设备中。

公开(公告)号：US20110299057A1

公开(公告)日：2011-12-08

申请号：US13100740

申请日：2011-05-04

申请人： Johannes Antonius Gerardus AKKERMANS ,  Theodorus Petrus Maria Cadee ,  George Wilhelmus Johannes Clijsen

发明人： Johannes Antonius Gerardus AKKERMANS ,  Theodorus Petrus Maria Cadee ,  George Wilhelmus Johannes Clijsen

IPC分类号： G03B27/58

CPC分类号： G03F7/70725 ,  G03F7/70991

摘要： A stage apparatus to position an object, the stage apparatus including a table configured to hold the object, a support structure configured to support the table, the table being displaceable relative to the support structure, the support structure including one of a first data clock and a second data clock and the table including the other one of the first data clock and the second data clock; and a circuit configured to synchronize the first and second data clocks, the circuit including a transmitter and receiver, the transmitter configured to wirelessly transmit clock signal data from the first data clock to the second data clock, and a synchronization circuit configured to synchronize the second data clock with the first data clock from the wirelessly transmitted clock signal data received by the receiver.

摘要翻译： 一种用于定位物体的舞台装置，舞台装置包括被配置为保持对象的桌子，被配置为支撑桌子的支撑结构，桌子可相对于支撑结构移动，支撑结构包括第一数据时钟和 第二数据时钟和包括第一数据时钟和第二数据时钟中的另一个的表; 以及电路，被配置为使所述第一和第二数据时钟同步，所述电路包括发射机和接收机，所述发射机被配置为将时钟信号数据从所述第一数据时钟无线传输到所述第二数据时钟;以及同步电路， 数据时钟具有来自接收机接收的无线传输时钟信号数据的第一个数据时钟。