公开(公告)号：US20110075122A1

公开(公告)日：2011-03-31

申请号：US12853916

申请日：2010-08-10

申请人： Sven Antoin Johan Hol ,  Jan Van Eijk ,  Antonius Fraciscus Johannes De Groot ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Geert-Jan Petrus Naaijkens ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

发明人： Sven Antoin Johan Hol ,  Jan Van Eijk ,  Antonius Fraciscus Johannes De Groot ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Geert-Jan Petrus Naaijkens ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

IPC分类号： G03B27/58

CPC分类号： G03F7/70758

摘要： A method for positioning a substage, supported by a main stage, relative to a reference object, the substage moveable in a direction between a first and second position relative to the main stage. The method includes positioning the first stage using a passive force system that is activated by positioning the main stage. The passive force system includes two magnet systems, each magnet system being configured to apply a force in the direction to the first stage with respect to the second stage in a non-contact manner, the forces resulting in a resultant force applied to the first stage in the direction by the passive force system. A magnitude and/or a direction of the resultant force depends on the position of the first stage relative to the second stage, and the first stage has a zero-force position between the first and second position in which the resultant force is zero.

摘要翻译： 一种用于定位由主台支撑的子台相对于参考对象的方法，所述子台可在相对于主台的第一和第二位置之间的方向上移动。 该方法包括使用通过定位主平台来激活的被动力系统来定位第一阶段。 被动力系统包括两个磁体系统，每个磁体系统构造成以非接触方式相对于第二平台向第一阶段施加力，所述力施加到第一阶段 被动力系统的方向。 合力的大小和/或方向取决于第一级相对于第二级的位置，第一级在合力为零的第一和第二位置之间具有零力位置。