公开(公告)号：US20070108848A1

公开(公告)日：2007-05-17

申请号：US11273634

申请日：2005-11-15

Applicant: Sven Hol ,  Angelo De Klerk ,  Erik Loopstra ,  Fransicus Jacobs ,  Mark Scholten ,  Arjan Bakker

Inventor： Sven Hol ,  Angelo De Klerk ,  Erik Loopstra ,  Fransicus Jacobs ,  Mark Scholten ,  Arjan Bakker

IPC: H02K41/00 ,  G03B27/42

CPC classification number: H02K41/03 ,  G03F7/70758 ,  H02K2201/18

Abstract: A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.

Abstract translation: 电动机包括用于产生磁场的磁体组件。 该场包括沿着第一方向的部分，其沿第一方向和第二方向交替取向。 这些部件在垂直于第一和第二方向的第三方向上延伸。 电动机还包括用于承载第一电流的第一线圈绕组。 所述第一线圈绕组在所述磁场的部分之间沿所述第一方向在所述第二方向上定向，以在所述第一方向上产生力。 电动机还包括用于承载第二电流的第二线圈绕组。 所述第二线圈绕组在所述磁场的各部分之间沿所述第一方向沿所述第一方向大致取向，以在所述第二方向上产生所述力。

公开(公告)号：US20070096566A1

公开(公告)日：2007-05-03

申请号：US11262962

申请日：2005-11-01

Applicant: Sven Hol ,  Erik Loopstra

Inventor： Sven Hol ,  Erik Loopstra

IPC: H02K41/00

CPC classification number: H02K41/03 ,  G03F7/70758 ,  G03F7/70858 ,  H01J2329/00 ,  H02K9/00

Abstract: A lithographic apparatus has a patterning support constructed to support a patterning device and a substrate support constructed to support a substrate. At least one of the patterning support and the substrate support is moved by an electromagnetic actuator. The actuator has a first part and a second part that are movable relative to each other. The first part has a coil structure, and the second part including a plurality of permanent magnets interacting with the coil structure. The second part is provided with a cooling structure arranged adjacent the permanent magnets. Cooling ducts are arranged between adjacent permanent magnets, or on a side of the permanent magnets facing the coil structure.

Abstract translation: 光刻设备具有构造成支撑图案形成装置和构造成支撑衬底的衬底支撑件的图形化支撑件。 图案形成支撑件和基板支撑件中的至少一个由电磁致动器移动。 致动器具有可相对于彼此移动的第一部分和第二部分。 第一部分具有线圈结构，并且第二部分包括与线圈结构相互作用的多个永磁体。 第二部分设置有与永磁体相邻布置的冷却结构。 冷却管道布置在相邻的永磁体之间，或者在面向线圈结构的永磁体的一侧。

公开(公告)号：US20050061626A1

公开(公告)日：2005-03-24

申请号：US10855962

申请日：2004-05-28

Applicant: Sven Hol ,  Johan Compter ,  Erik Loopstra ,  Patricia Vreugdewater

Inventor： Sven Hol ,  Johan Compter ,  Erik Loopstra ,  Patricia Vreugdewater

IPC: H01L21/027 ,  H02K7/09 ,  H02K41/025 ,  H02N15/02 ,  H02P25/06 ,  G03F7/20

CPC classification number: H02K7/09 ,  H02K41/025 ,  H02K2201/18 ,  H02N15/02 ,  Y10S414/135

Abstract: A displacement apparatus comprising a first part and a second part, which can be displaced relative to each other in first and second different directions. The apparatus being suitable for use in a lithographic apparatus for positioning the mask holder with respect to the projection beam and for positioning the wafer substrate table with respect to the patterned beam. The first part comprises a first and second coil system in which an alternating current is provided by a power supply. The second part comprises a conductive platen which is disposed in a zone in which a magnetic field is induced when power is supplied to the coil systems. The coil system and platen are arranged with respect to each other so that when currents are passed through the coils, a magnetic field induced in the platen causes displacement between the platen and the coils in the first and second different directions.

Abstract translation: 一种位移设备，包括可在第一和第二不同方向上相对于彼此移位的第一部分和第二部分。 该设备适用于光刻设备中，用于相对于投影光束定位掩模保持器并且相对于图案化的光束定位晶片衬底台。 第一部分包括第一和第二线圈系统，其中交流电由电源提供。 第二部分包括导电台板，该导电台板设置在向线圈系统供电时引起磁场的区域。 线圈系统和压板相对于彼此布置，使得当电流通过线圈时，在压板中感应的磁场引起压板和线圈在第一和第二不同方向上的位移。

公开(公告)号：US20060082753A1

公开(公告)日：2006-04-20

申请号：US10967306

申请日：2004-10-19

Applicant: Henrikus Cox ,  Sven Hol ,  Hernes Jacobs

Inventor： Henrikus Cox ,  Sven Hol ,  Hernes Jacobs

IPC: G03B27/58

CPC classification number: G03F7/70758

Abstract: An actuator assembly includes a coil moveably positionable in a magnetic field generated by a magnet assembly, each of the coil and the magnet having substantially only one side facing the other. A magnetized field-shaping element is provided for shaping the magnetic field such that the magnetic field is substantially perpendicular to the direction of the electrical current for generating a force in a first degree of freedom. Thus, the coil may easily be mounted, since it does not need to be enclosed by magnet poles.

Abstract translation: 致动器组件包括能够由磁体组件产生的磁场中的可移动地定位的线圈，线圈和磁体中的每一个基本上只有一个面朝向另一侧。 提供磁化场成形元件用于使磁场成形，使得磁场基本上垂直于用于产生第一自由度的电流的方向。 因此，线圈可以容易地安装，因为它不需要被磁极包围。

公开(公告)号：US20050146698A1

公开(公告)日：2005-07-07

申请号：US10964818

申请日：2004-10-15

Applicant: Sven Hol ,  Edwin Buis ,  Patricia Vreugdewater

Inventor： Sven Hol ,  Edwin Buis ,  Patricia Vreugdewater

IPC: G03F7/20 ,  H01L21/027 ,  H02K11/00 ,  G03B27/42

CPC classification number: H02N15/00 ,  G03F7/70758 ,  G03F7/70941 ,  H02K11/01 ,  H02K41/0352

Abstract: A lithographic apparatus includes a positioning system including a first and second electromagnetic actuator. Each actuator includes two mutually co-operating electromagnetical elements which are movable with respect to one another due to force acting on the elements of the respective actuator. At least one of the actuators includes a shield configured to shield the actuator from a field generated by the other actuator. In this manner, a disturbance force due to the field is prevented to act on the shielded actuator. The invention also includes a positioning system including such actuators.

Abstract translation: 光刻设备包括一个包括第一和第二电磁致动器的定位系统。 每个致动器包括两个相互协调的电磁元件，它们由于作用在相应致动器的元件上的力而相对于彼此可移动。 致动器中的至少一个包括被配置为将致动器屏蔽到由另一致动器产生的场的屏蔽件。 以这种方式，防止由于场引起的干扰力作用在屏蔽的致动器上。 本发明还包括一种包括这种致动器的定位系统。

公开(公告)号：US20070164697A1

公开(公告)日：2007-07-19

申请号：US11331337

申请日：2006-01-13

Applicant: Henrikus Cox ,  Hans Butler ,  Sven Hol

Inventor： Henrikus Cox ,  Hans Butler ,  Sven Hol

IPC: H02P1/46

CPC classification number: H02P25/06

Abstract: A lithographic apparatus includes an illumination system to condition a radiation beam. A patterning support holds a patterning device that imparts the radiation beam with a pattern to form a patterned radiation beam. A substrate support holds a substrate. A projection system projects the patterned radiation beam onto the substrate. A positioning system positions the patterning support and the substrate support. The positioning system has a motor with a stator and a mover coupled to a support, and an associated motor control system with a controller providing an output for controlling currents applied to the motor. The motor control system determines a controller output required to compensate for a weight of mover and associated support, determines a deviation of this output from an output required to compensate the gravity force acting on the mover and associated support, and corrects the currents applied to the motor based on the deviation.

Abstract translation: 光刻设备包括用于调节辐射束的照明系统。 图案形成支撑件保持图案形成装置，其使得辐射束具有图案以形成图案化的辐射束。 衬底支撑件保持衬底。 投影系统将图案化的辐射束投射到衬底上。 定位系统定位图形支撑件和基板支撑件。 定位系统具有带有定子的电动机和耦合到支撑件的动子，以及具有控制器的相关联的电动机控制系统，该控制器提供用于控制施加到电动机的电流的输出。 电动机控制系统确定需要补偿动力和相关支撑的重量的控制器输出，确定该输出与补偿作用在动子和相关支撑上的重力所需的输出的偏差，并校正施加到 电机基于偏差。

公开(公告)号：US20060221323A1

公开(公告)日：2006-10-05

申请号：US11098608

申请日：2005-04-05

Applicant: Henrikus Cox ,  Sven Hol ,  Petrus Vosters

Inventor： Henrikus Cox ,  Sven Hol ,  Petrus Vosters

IPC: G03B27/58

CPC classification number: G03F7/70791 ,  G03F7/70716 ,  G03F7/70758

Abstract: A positioning device for positioning an object table comprises a frame for supporting the object table in a first direction, a motor unit constructed and arranged for exerting a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction. The motor unit comprises a first part constructed and arranged to co-operate with a second part for generating the first and second force, the first part being arranged on the object table, such that both the first force and the second force are directed substantially through the centre of gravity of the object table.

Abstract translation: 用于定位物体台的定位装置包括：用于在第一方向上支撑物体台的框架;马达单元，被构造和布置成在基本上垂直于第一方向的第二方向上施加在物台上的第一力;以及第二力 在基本上垂直于第一方向和第二方向的第三方向上在物体台上。 马达单元包括构造和布置成与第二部分配合以产生第一和第二力的第一部分，第一部分布置在对象台上，使得第一力和第二力都基本上通过 对象表的重心。