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公开(公告)号：US20060145610A1
公开(公告)日：2006-07-06
申请号：US11262939
申请日：2005-11-01
IPC分类号： H01J17/49
CPC分类号： H01J11/12 , H01J11/24 , H01J2211/225 , H01J2211/245
摘要： A panel structure is provided in which a dielectric layer having no voids thereinside can be formed by a vapor deposition method. A layered film of plural metal layers that constitute an electrode covered with a dielectric layer is formed to have a stepped shape in which a width is smaller from a bottom layer to an uppermost layer for each layer in order. The stepped shape is formed by projecting an edge portion of a lower layer by design compared to an upper layer.
摘要翻译： 提供一种面板结构，其中可以通过气相沉积法形成其中没有空隙的介电层。 构成覆盖有电介质层的电极的多个金属层的分层膜形成为具有阶梯形状，其中，对于每层，从底层到最上层的宽度较小。 与上层相比，通过设计使下层的边缘部分突出来形成台阶状。
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公开(公告)号：US20060035466A1
公开(公告)日：2006-02-16
申请号：US11094838
申请日：2005-03-31
IPC分类号： H01L21/20
CPC分类号： H01J9/02 , H01J9/241 , H01J2211/38
摘要： A method for manufacturing a plasma display panel including a dielectric layer that is formed by a vapor deposition method and covers electrodes except their terminal portions, includes the steps of depositing a dielectric on a substrate on which each of the electrodes having a terminal portion at an end is arranged by a vapor deposition method so that the dielectric forms a layer for covering the electrodes over the entire length thereof, and removing a portion of the layer formed by the vapor deposition method that covers the terminal portions of the electrodes by a polishing method in which a polishing rate of the portion is larger than that of the terminal portion or by a dry etching method.
摘要翻译： 一种等离子体显示面板的制造方法，其特征在于，具有通过气相沉积法形成的电介质层，并且覆盖其端子以外的电极的等离子体显示面板的制造方法，其特征在于，包括以下步骤：将电介质沉积在基板上， 端部通过气相沉积法布置，使得电介质在其整个长度上形成用于覆盖电极的层，并且通过抛光方法去除覆盖电极的端子部分的气相沉积方法形成的层的一部分 其中该部分的抛光速率大于末端部分的抛光速率或通过干蚀刻方法。
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